| Title |
Chemical Vapor Deposition ( C . V . D ) |
| Abstract |
Chemical vapor deposition techniques have been applied to refractory metals, ceramics, semiconductors, insulators and conductors. The principles and techniques of chemical vapor deposition reactions for the above materials are reviewed. A new design concept of a high temperature hoop stress measurement apparatus for C.V.D. tungsten and other refractory metal alloys is discussed. |