| Title |
Structure and Properties of Chromium Deposited by Physical Vapor Deposition |
| Authors |
한봉희(B . H . Hahn); 안병철(B . C . Ahn) |
| Abstract |
Chromium films deposited on steel and glass substrates by electron beam evaporation were studied by scanning electron microscopy, x-ray diffraction, and micro-hardness testing. With increasing temperature from room temperature to 850℃, the porous and micro-domed structure of deposits changed into the faceted and the macro-ledge structures at above 300℃, and the smooth and grooved structure above about 750℃. And the [110] grain orientation at room temperature changed into [112]. The volume fraction of [112] was maximum and that of [110] was minimum at about 300℃. With increasing temperature from 300℃, [200] volume fraction was increased up to about 720℃ and grains were almost random oriented above 720℃. The relations between hardness and grain size of films were explained by Hall-Petch equation. |