| Title |
Hardness and Adhesion of the Reactively Sputtered ZrN Coating on the Tool Steel |
| Authors |
예길촌(Gil Ghon Ye); 신현준(Hyun Jun Shin); 권식철(Sik Chol Kwon); 백운승(Woon Seung Baek) |
| Abstract |
ZrN and Zr/ZrN layers were deposited on tool steel(SKH9) by a reactive DC magnetron sputtering technique and their microhardness and adhesion strength were measured for the films processed by changing the partial pressur of N₂gas(4∼10×10^(-4)mbar) and the substrate bias voltage(0∼250V). The adhesion strength was evaluated by acoustic signals through the scratch-test with the incremental applied load. As the bias voltage was applied, the adhesion strength of the films was observed five times as strong as that obtained without bias voltage. The adhesion strength of the Zr/ZrN doublelayered structure was measured to 20∼24N and it was deposited two times as strong as that in the monolayered Zr interlayer increased about twice more than that of the load of ZrN monolayered structure ZrN(10N). The microhardness of the ZrN film was shown to be Hv 1800Kg/㎟ when the bias boltage was 200V and the partial pressure was N₂4×10^(-4)mbar. From the failure mode on the film during scratch adhesion test, it was found that the adhesive failure was observed in the ZrN monolayer and the cohesive failure was found in the Zr/ZrN doublelayed structure. |