| Title |
A thermodynamical Study on the Phase Formation and Sequence by Ion Beam Mixing In Al / Cr System |
| Authors |
최정동(Jeong Dong Choi); 곽준섭(Joon Seop Kwak); 홍진석(Jin Seok Hong); 지응준(Eung Joon Chi); 박상욱(Sang Wook Park); 백홍구(Hong Koo Baik); 채근화(Keun Hwa Chae); 정성문(Sung Mun Jung); 황정남(Chung Nam Whang) |
| Abstract |
Evaporated Al/Cr thin films were irradiated with various doses to produce intermetallic compounds. In order to study the first phase formation and phase sequence, RBS, XRD and TEM studies have been used. RBS analysis shows that intermixing has occurred across the Al/Cr interface and mixing variance increases with increasing ion dose. The Al_(13)Cr₂ phase is formed as an initial phase by ion beam mixing and then transforms into the Al_(11)Cr₂ or Al₄Cr phases at subsequent ion bomdardment. This phenomenon is discussed in terms of the enhanced atomic mobility and the thermodynamical driving force by introducing the effective heat of formation(ΔH) model. The experimental results agree with that predicted by effective heat of formation model. It has been studied the first phase formation and phase sequence by Ion Beam Mixing in metal/Si systems as well as metal/metal systems. |