| Title |
Thermal Behavior of PECVD Diamondlike Carbon Thin Films Fabricated with a Low Discharging Frequency |
| Authors |
김한(Han Kim); 주승기(Seung Ki Joo) |
| Abstract |
Diamondlike carbon films were fabricated by PECVD with a low discharging frequency and effects of heat treatment on the C-H bonding states as well as the microhardness were investigated. It turned out that the discharging frequency has a considerable effect on the thermal stability of DLC thin films. DLC films fabricatd with 450 kHz discharging frequency did not show any delamination from the silicon substrate even after annealing at 900℃ and the microhardness of the films showed less sensitivity to temperature than the DLC films with 13.56MHz discharging frequency. Improvements on the thermal stability were attributed to the C-H bonding states of such films, which is related to the energy of depositing species in PECVD. |