| Title |
Adhesion of TiC , TiN and Tic / TiN Coatings Deposited by R . F . PECVD |
| Authors |
최재영(Jae Young Choi); 남옥현(Ok Hyun Nam); 이인우(In Woo Lee); 김문일(Moon Il Kim) |
| Abstract |
In this study, TiC, TiN and TiC/TiN coatings were deposited on the tool steel(SKH9) by PECVD to evaluate the performance of coatings. So, TiC, TiN and TiC/TiN coatings have been characterized using XRD, AES and EDS. Microhardness mearsurement, indentation, scratch adhesion and wear test were carried out to investigate mechanical properties. As a result, the hardness of TiN, TiC and TiC/TiN coatings were Hv1700, Hv4000 and Hv2400, and critical loads(L_c) in scratch adhesion test were 14, 10 and 28N respectively. TiC/TiN double layers have shown excellent properties in indentation, scratch adhesion test and wear resistance. This is thougtht due to high hardness of TiC innerlayer, toughness of TiN outerlayer, and the inhibition of crack propagation by its deflection at the TiC/TiN interface. |