| Title |
Research Paper - Transformations - : Alloying Reaction of In / Sb Multi - layered Thin Films by Heat Treatment |
| Authors |
이승호(Seung Ho Lee); 이병일(Byung Il Lee); 주승기(Seung Ki Joo) |
| Abstract |
InSb thin films with electron mobility as high as 49,000 ㎠/V·sec were formed by heat treatment at 535℃ for 5 minutes of multi-layered(Al₂O₃/In(9,000A˚)/Sb(1 ㎛)) thin films. And it was found that the annealing time and temperature margins to get InSb films of high electron mobility were much narrow. InSb formation mechanisms of In/Sb multi-layered thin films were proposed on the base of In-Sb phase diagram. |