| Title |
A Study on the Fabrication of Lithium Thin-Film Batteries with Lithium-Manganese Oxide Thin Films |
| Authors |
박영신(Young Sin Park) ; 이세희(Se Hee Lee) ; 이병일(Byung Il Lee) ; 주승기(Seung Ki Joo) |
| Abstract |
Thin-film rechargeable lithium batteries with LiMn₂O₄ cathodes were fabricated. The lithium manganese oxide thin films were deposited by RF magnetron sputtering and spinel structure was formed by rapid thermal annealing (RTA) in an oxygen ambient. The as-deposited films turned out to be amorphous, and could be crystallized into a spinel structure by RTA above 650℃. LiMn₂O₄ spinel films prepared at 750℃ showed good rechargeability and fast lithium intercalation kinetics. All solid state thin-film batteries were fabricated with cell structure of Li/LiPON/LiMn₂O₄, by sequential deposition. Room temperature cycling of this cell showed a nealy constant cell potential of 4V and good rechargeability. |