| Title |
A Study on the Fabrication Technology and Magnetic Characteristics of FeTaN Films Inductor at High Frequency |
| Authors |
이창호(Chang Ho Lee) ; 신동훈(Dong Hoon Shin) ; 남승의(Seoung Eui Nam) ; 김형준(Hyoung June Kim) |
| Abstract |
The purposes of this research were to develop the magnetic thin films using for high frequency range and to establish the processing technique of a meander type micro-coil in order to produce the micro magnetic device(MMD) and analyze its electrical characteristics. As magnetic thin films, we used Fe_(78.8)Ta_(8.5)N_(12.7) films which had nano-crystalline structure produced by a DC magnetron reactive sputtering system, magnetic properties were like these : Bs=15∼16 kG. Hc=0.12∼0.17 Oe, μ`=2800∼4000. The Cu coil produced by selective electro-plating(SEP) showed the resistivity of 2 μΩ-㎝. In case of the meander type magnetic thin films inductor with 5 turns, an inductance of 229 nH which is about 4 times higher than that of air core inductor was shown, and a resonance frequency of 37 MHz and a quality factor of 1.8 at 10 MHz were also shown. |