| Title |
Structural Analysis of Magnetron Sputtered NiFe/Ag Multilayers |
| Authors |
서유석(Yoo Suk Shu),이성래(Seong Rae Lee) |
| Abstract |
The structural characteristics of NiFe/Ag multilayers prepared by magnetron sputtering were studied. For the quantitative structural analysis of the multilayers, we used XRD simulation based on a superlattice structural model considering gaussian fluctuations in the thickness of each layer and interface. Because of large lattice mismatch and large surface energy difference in the NiFe/Ag multilayer system, it is difficult to fabricate good uniform multilayer. Among the deposition parameters, the sputtering gas(Ar/H₂) was the most effective to enhance the uniformity of the multilayers. As the period of the multilayer increased, the uniformity of the multiayer was improved. |