| Title |
Pesearch Paper / Electronic , Magnetic & Optical Matrials : A Study on the Formation of Large Single Grains in PZT Thin Films by PZT seed |
| Authors |
이장식(Jang Sik Lee),박응철(Eung Chul Park),박정호(Jung Ho Park),이병일(Byung Il Lee),주승기(Seung Ki Joo) |
| ISSN |
1738-8228(ISSN), 2288-8241(eISSN) |
| Abstract |
Selective nucleation and lateral growing method have been developed for high quality ferroelectric PZT(65/35) thin films using perovskite-phase PZT island seed. The PZT films on PZT seed island transformed into perovskite-phase at temperature as low as 540℃, which temperature is lower than 150℃ compared to that of the PZT thin films deposited on Pt films. The temperature difference enables the lateral growth without undesirable random nucleation. Maximum grain sizes of the perovskite-phase PZT films are determined by annealing temperature. The PZT thin films show leakage current density of 8×10^(-8) A/㎠, breakdown field of 1240 kV/㎝, saturation polarization of 42μC/㎠, and remanent polarization of 30μC/㎠, which values are maintained up to 2×10^11 cycles. |