| Title |
Pesearch Paper / Electronic , Magnetic & Optical Matrials : Effect of Electric Field on Metal - Induced Lateral Crystallization of Amorphous Silicon Thin Films |
| Authors |
김창훈(Chang Hoon Kim),이병일(Byung Il Lee),주승기(Seung Ki Joo) |
| ISSN |
1738-8228(ISSN), 2288-8241(eISSN) |
| Abstract |
Amorphous silicon was crystallized by metal induced lateral crystallization(MILC) in an electric field. A 50 Å Ni layer on a-Si was used for the crystallization and 3000 Å Pt layers for the electrodes. In a DC electric field over 200 V/㎝, MILC rate of a-Si with negative polarity increased and with positive polarity decreased. In an AC electric field over 2200 V/㎝, MILC rate increased and this phenomenon can be explained by Joule heating effect. |