| Title |
Production of Smart Multilayer Film Composed of TiNi Shape Memory Alloy and PZT Ferroelectric Material |
| Authors |
김익준(Ick Jun Kim),배차헌(Cha Hurn Bae) |
| ISSN |
1738-8228(ISSN), 2288-8241(eISSN) |
| Abstract |
Multilayer system composed of TiNi shape memory alloy and PZT ferroelectric material is expected to perform the integrated function which is capable for sensing and actuating. To fabricate the integrated function material, it is necessary to design the multilayer film without inter-diffusion at the interface, and to have appropriate crystalline phases for each layer. In this work, TiNi thin films were deposited on sol-gel derived PZT thin films. When Pt barrier layer was deposited on PZT layer, TiNi layer deposited at 350℃ was successfully crystallized. This multilayer film had no other inter-diffusion layer at the interface and indicated the B2(110) phase for TiNi layer and the perovskite phase for PZT layer. This multilayer film has also shown the shape memory effect for TiNi layer and the ferroelectric behaviour for PZT layer. |