| Title |
High Temperature Oxidation of TiN, TiCN and CrN Thin Films |
| Authors |
백창현(Baeg Chang Hyeon); 홍주화(Hong Ju Hwa); 위명용(Wi Myeong Yong); 김기영(Kim Gi Yeong); 이동복(Lee Dong Bog) |
| ISSN |
1738-8228(ISSN), 2288-8241(eISSN) |
| Keywords |
Oxidations behavior; TiN; TiCN; CrN |
| Abstract |
The oxidation behavior of TiN, TiCN and CrN coatings sputtered on a steel substrate was investigated at 850℃ in air. Both TiN and TiCN oxidized to Tio₂ while CrN oxidzed to Cr₂O₃. The oxidation resistance decreased in the order of CrN, TiN and TiCN. During oxidation, the outward diffusion of substrate elements such as Fe, Si occurred to a certain degree. The enrichment of substrate element of Cr at the oxide scale and the depletion of nitrogen at the lower part of the unoxidized CrN coating were observed. |