| Title |
Effects of Eletroforming Condition on the Composition of Fe-Ni Alloy Micro-structure for MEMS |
| Authors |
김준우(Joon Woo Kim); 김대룡(Dai Ryong Kim) |
| ISSN |
1738-8228(ISSN), 2288-8241(eISSN) |
| Keywords |
Fe-Ni alloy; Alloy-plating; UV-LIGA; MEMS; Pulse-plating; SU-8 |
| Abstract |
In this study, for the applications of Fe-Ni alloys into MEMS technique through a UV-LIGA processing, the electroplating conditions of the Fe-Ni alloys on the Cu plate as well as micropatterned mold have been studied. The compositional changes of the deposited layer have been related to the electroplating conditions including metal-ion ratio, current density, rotating speed, pH, temperature and pulse current. The effects of every condition were investigated by electrofoming in RDE(rotating disk electrode) type plating cell and then the compositions of deposit were examined. It has been found that current density and metal ion ratio were the most influential factor on the compositional changes in deposited layer and the other conditions were also discussed in the view of anomalous behaviour of electrodeposition of Fe-Ni alloy. |