| Title |
Thermal Stability of Sn Doped In2O3 Film Protected by Sb Doped SnO2 Film Deposited by Magnetron Sputtering |
| Authors |
이승훈(Seung Hoon Lee); 김영도(Young Do Kim); 김원목(Won Mok Kim) |
| ISSN |
1738-8228(ISSN), 2288-8241(eISSN) |
| Keywords |
transparent conducting film; magnetron sputtering; indium tin oxide; dye-sensitized solar cell; thermal stability |
| Abstract |
Sn doped Indium oxide (ITO) films coated by Sb doped tin oxide (ATO) films with varying thickness were deposited by radio frequency magnetron sputtering, and their temperature dependence of electrical and optical properties were examined. ITO and ATO films deposited at 300℃ by using optimized oxygen content yielded resistivity values of 1.04 x 10(-4) and 3.37 x 10(-3)Ωcm, respectively. Annealing of monolithic ITO film in atmospheric environment up to 500℃ resulted in increase of sheet resistance of about 3.5 times. It was shown that the ATO films deposited at 300℃ could retard the increase of sheet resistance of dual layer and reduce the final amount of degradation to some extent, but could not give satisfactory protection. The ITO layer covered with ATO film deposited at 500℃, however, resulted in the increase of sheet resistance of only 1.4times, and could be used as the substrate with excellent conductivity for dye-sensitized solar cell, in which the sintering of TiO2 nano-particles at elevated temperature as high as 500℃ in atmosphere is inevitable to form electrodes. |