| Title |
A Study on Manufacturing of LCD Prism Sheets Through Silicon Anisotropic Etching |
| Authors |
전광석(Kwang Seok Jeon); 류근걸(Kun Kul Ryoo) |
| ISSN |
1738-8228(ISSN), 2288-8241(eISSN) |
| Keywords |
prism sheets; Si anisotropic etching; zigzag patterns; cross pattern; Ni stamp; fast H/C injection molding; transmissivity |
| Abstract |
Prism sheet of LCD BLU which depends on supply from Japan and U.S.A was studied by using Si anisotropic etching and injection molding technologies. First, the prism sheet was patterned on Si wafer through photolithography, and the best conditions of Si etching were determined through etching Si wafer with TMAH to obtain straight optimized zigzag patterns, and a cross pattern to provide light diffusion and concurrent focusing. The etch rate of TMAH was concluded to be constant for 25wt%-70oC condition. Ni stamp of prism sheet was made by electrodeposition using patterned Si wafer, normal or fast H/C(Heating/Cooling) injections were carried out to fabricate prism sheet. It was known that fast H/C injection could fabricate prism sheet more accurately than normal injection. Zigzag patterns and the cross pattern showed higher transmissivity than the straight patterns because of light diffusion through diagonal direction. The fast H/C injection for zigzag patterns showed lower transmissivity than normal injection because there occurred more light diffusion through precise injection patterns, but the fast H/C injection for straight patterns showed only refraction without diffusion, causing lower transmissivity than normal injection. |