| Title |
Laser-Direct Patterning of Nanostructured Metal Thin Films |
| Authors |
신현권(Hyun Kwon Shin); 이형재(Hyeong Jae Lee); 유형근(Hyeong Geun Yoo); 임기수(Ki Soo Lim); 이명규(Myeong Kyu Lee) |
| DOI |
https://doi.org/10.3365/KJMM.2010.48.02.163 |
| ISSN |
1738-8228(ISSN), 2288-8241(eISSN) |
| Keywords |
thin films; metals; nanostructured materials; scanning electron microscopy; microstructurds |
| Abstract |
We here describe the laser-direct patterning of nanostructured metal thin films. This method involves light-matter interaction in which a pulsed laser beam impinging on the film generates a thermoelastic force that plays a role to detach the film from the substrate or underlying layers. A moderate cohesion of the nanostructured film enables localized desorption of the material upon irradiation by a spatially-modulated laser beam, giving good fidelity with the transfered pattern. This photoresist-free process provides a simple high-resolution scheme for patterning metal thin films. |