| Title |
Formaldehyde Gas-Sensing Characteristics of SnO2-ZnO Materials |
| Authors |
윤진호(Jin Ho Yoon); 이회중(Hoi Jung Lee); 김정식(Jung Sik Kim) |
| DOI |
https://doi.org/10.3365/KJMM.2010.48.02.169 |
| ISSN |
1738-8228(ISSN), 2288-8241(eISSN) |
| Keywords |
formaldehyde sensor; nanostructured materials; sol-gel; electrical properties; electrical conductivity/resistivity |
| Abstract |
A micro gas sensor for formaldehyde (HCHO) gas was fabricated by using MEMS (Micro Electro Mechanical System) technology and the sol-gel process. The sensing materials of the SnO2-ZnO system were synthesized by the sol-gel method. The crystal structure and thermal analysis of the SnO2-ZnO were characterized by XRD and DSC-TGA. The fabricated gas sensors were tested at various gas concentrations (0.5~5.0 ppm) and different operation temperatures (350~550℃). The SnO2-10 mol%ZnO sensor showed the highest sensitivity (Rs=0.24) for 1.0 ppm-formaldehyde at 500℃ and response time (90% saturation time) was within 20 seconds. |