| Title |
Sample Preparation for EBSD Analysis: Tips for Metals with Delicate Surfaces |
| Authors |
강주희(Joo Hee Kang); 김수현(Su Hyeon Kim) |
| DOI |
https://doi.org/10.3365/KJMM.2010.48.08.730 |
| ISSN |
1738-8228(ISSN), 2288-8241(eISSN) |
| Keywords |
EBSD; metals; microstructure; mechanical polishing; ion-milling |
| Abstract |
Aluminum, magnesium, titanium and high Mn steel are difficult to use in electron backscatter diffraction (EBSD) sample preparation due to the formation of an oxidation layer under conventional polishing. Alcohol-based polishing with colloidal silica suspension was introduced for these delicate samples. A hard particle-embedded sample was analyzed successfully using mechanical polishing. Ion-milling was effective in removing oxidized, deformed and transformed layers after mechanical polishing and was able to reduce artifacts significantly. The microstructure of a cross-section of a thin copper film was evaluated by attachment of a dummy to the film for mechanical polishing. |