| Title |
Gas Sensing Characteristics of Ru doped-WO3 Micro Gas Sensors |
| Authors |
이회중(Hoi Jung Lee); 윤진호(Jin Ho Yoon); 김범준(Bum Joon Kim); 장현덕(Hyun Duck Jang); 김정식(Jung Sik Kim) |
| DOI |
https://doi.org/10.3365/KJMM.2011.49.5.395 |
| ISSN |
1738-8228(ISSN), 2288-8241(eISSN) |
| Keywords |
compounds; sol-gel; electrical properties; resistivity; gas sensor; tungsten oxide; ruthenium; NH3 |
| Abstract |
In this study, micro gas sensors for ammonia gas were prepared by adopting MEMS technology and using a sol-gel process. Three types of sensors were prepared via different synthesis routes starting with W sol and Ru sol mixture. This mixture was deposited on a MEMS platform and the platform was subsegueny heated to a temperature of 350℃. The topography and crystal structure of the sensing film were studied using FE-SEM and XRD. The response of the gas sensor to NH3 gas was examined at various operating temperatures and gas concentrations. The sensor response increased almost linearly with gas concentration and the best sensing response was obtained at 333℃ for 5.0 ppm NH3 for the specimen prepared by coating WO3 powders with the Ru sol mixture. |