The Journal of
the Korean Journal of Metals and Materials

The Journal of
the Korean Journal of Metals and Materials

Monthly
  • pISSN : 1738-8228
  • eISSN : 2288-8241

Editorial Office


  1. ์ธํ•˜๋Œ€ํ•™๊ต ์‹ ์†Œ์žฌ๊ณตํ•™๊ณผ (Department of Materials Science and Engineering, Inha University, Incheon 22212, Republic of Korea)



cold spray, pure cu, compression, tensile, high-strength, deformation behavior, constitutive model

1. ์„œ ๋ก 

Cold spray ๊ณต์ •์ด๋ž€ 1-50 ฮผm ํฌ๊ธฐ์˜ ๊ธˆ์† ๋ถ„๋ง์„ ๋‚ฎ์€ ์˜จ๋„์—์„œ ์•ฝ 300-1200 m/s์˜ ์ดˆ์Œ์†์œผ๋กœ ๊ฐ€์†์‹œ์ผœ ๋ชจ์žฌ์™€ ์ถฉ๋Œ์‹œํ‚ค๊ณ , ์ด์— ์ˆ˜๋ฐ˜๋˜๋Š” ์†Œ์„ฑ ๋ณ€ํ˜•์„ ์ด์šฉํ•˜์—ฌ ๋น ๋ฅด๊ฒŒ ์ ์ธต์‹œํ‚ค๋Š” ๊ธฐ์ˆ ๋กœ ์ผ๋ช… kinetic spray ๋ผ๊ณ ๋„ ๋ถˆ๋ฆฐ๋‹ค [1,2]. Cold spray ๊ณต์ •์˜ ๊ฐ€์žฅ ํฐ ์žฅ์ ์€ ์ฃผ๋กœ ์ƒ์˜จ์—์„œ ์ง„ํ–‰๋˜๊ธฐ ๋•Œ๋ฌธ์— ์‚ฐํ™”๋ฌผ์ด ๊ฑฐ์˜ ์ƒ์„ฑ๋˜์ง€ ์•Š๊ณ , ๊ฐ๊ฐ์˜ ๋ถ„๋ง์„ ๊ฐ•์†Œ์„ฑ๋ณ€ํ˜• (severe plastic deformation) ์‹œํ‚ด์œผ๋กœ์จ ์ž…์ž ๊ณ„๋ฉด (interface)์˜ ๊ฒฐํ•ฉ๋ ฅ ์ƒ์Šน์„ ํ†ตํ•ด ๊ณ  ๋ฐ€๋„์˜ ์†Œ์žฌ๋ฅผ ์–ป์„ ์ˆ˜ ์žˆ๋‹ค๋Š” ๊ฒƒ์ด๋‹ค [3,4]. ๋˜ํ•œ ์ผ๋ฐ˜์ ์ธ ์šฉ์‚ฌ์ฝ”ํŒ… ๊ณต์ • (plasma spray, HVOF ๋“ฑ)๊ณผ๋Š” ๋‹ฌ๋ฆฌ ๊ณ ์˜จ์˜ ์—ด์›์„ ํ•„์š”๋กœ ํ•˜์ง€ ์•Š๊ธฐ ๋•Œ๋ฌธ์— ์‚ฐํ™” ํ˜น์€ ์ƒˆ๋กœ์šด ์ƒ์— ์˜ํ•œ ๋ฌผ์„ฑ ์ €ํ•˜์™€ ๊ฐ™์€ ๋‹จ์ ์„ ๋ณด์™„ํ•  ์ˆ˜ ์žˆ๋Š” ์‹ ๊ธฐ์ˆ ์ด๋‹ค. ํ˜„์žฌ๊นŒ์ง€ cold spray ๊ณต์ •์€ ๋‚ด๋ถ€์‹-๋‚ด๋งˆ๋ชจ์šฉ ์ฝ”ํŒ… ํ˜น์€ ๋ฆฌํŽ˜์–ด (repair)์šฉ ๊ณต์ •์œผ๋กœ ์ฃผ๋กœ ์‚ฌ์šฉ๋˜์–ด์™”๋‹ค [5-7]. ๊ทธ๋Ÿฌ๋‚˜ ์ตœ๊ทผ cold spray ๊ณต์ •์ด near-net shape ์ œ์กฐ๊ฐ€ ๊ฐ€๋Šฅํ•œ ๊ณ ์ƒ ์ ์ธต ์ œ์กฐ (solid-state additive manufacturing) ๊ธฐ์ˆ ๋กœ ๊ณ ๋ ค๋จ์— ๋”ฐ๋ผ ์ด์— ๋Œ€ํ•œ ๊ด€์‹ฌ์ด ์ฆ๊ฐ€ํ•˜๊ณ  ์žˆ๋‹ค [8]. Cold spray additive manufacturing (CSAM) ๊ธฐ์ˆ ์€ ๋ถ„๋ง์„ ์šฉ์œต-์‘๊ณ ์‹œ์ผœ 3 ์ฐจ์›์˜ ์กฐํ˜•์ฒด๋ฅผ ์ œ์ž‘ํ•˜๋Š” ๋ถ„๋ง ๋ฒ ๋“œ์šฉ์œต๋ฒ• (powder bed fusion, PBF) ๋ฐ ์ง์ ‘ ์—๋„ˆ์ง€ ์ฆ์ฐฉ๋ฒ• (direct energy deposition, DED) ๊ณต์ •๊ณผ ๋น„๊ตํ•˜์—ฌ ์น˜์ˆ˜ ์ •๋ฐ€๋„๋Š” ์ƒ๋Œ€์ ์œผ๋กœ ๋‚ฎ์ง€๋งŒ, ๋ถ„๋ง์„ ์šฉ์œต์‹œํ‚ค์ง€ ์•Š๊ธฐ๋•Œ๋ฌธ์— ๋‹ค์–‘ํ•œ ๋ฏธ์„ธ์กฐ์ง์ -๊ธฐ๊ณ„์  ์žฅ์ ์„ ๊ฐ€์งˆ ์ˆ˜ ์žˆ์„ ๊ฒƒ์œผ๋กœ ์˜ˆ์ƒ๋œ๋‹ค [9-10].

๊ทธ๋Ÿฌ๋‚˜, CSAM ๊ธฐ์ˆ ์— ๋Œ€ํ•œ ๊ด€์‹ฌ์ด ์ ์ฐจ ์ฆ๊ฐ€ํ•จ์—๋„ ๋ถˆ๊ตฌํ•˜๊ณ  3 ์ฐจ์› ๊ตฌ์กฐ ์†Œ์žฌ๋กœ์„œ ์‚ฌ์šฉ๋˜๊ธฐ์— ๊ฐ€์žฅ ๊ธฐ๋ณธ์ด ๋˜๋Š” ๊ธฐ๊ณ„์  ํŠน์„ฑ ํ‰๊ฐ€๋Š” ๋Œ€๋ถ€๋ถ„ ๊ฒฝ๋„ ์‹œํ—˜ [11,12], ๋งˆ์ดํฌ๋กœ ์ธ๋ดํ…Œ์ด์…˜ ์‹œํ—˜ [13]์— ๊ตญํ•œ๋˜์–ด์ ธ ์žˆ๋‹ค. ์ผ๋ถ€ ๋งˆ์ดํฌ๋กœ ์ธ์žฅ ์‹œํ—˜์„ ํ†ตํ•œ ๊ธฐ๊ณ„์  ํŠน์„ฑ ํ‰๊ฐ€, ํŒŒ๋‹จ๋ฉด ๋ถ„์„์ด ์ผ๋ถ€ ์—ฐ๊ตฌ ๋ณด๊ณ ๋œ ๋ฐ” ์žˆ์œผ๋‚˜ ๋ณ€ํ˜•/ํŒŒ๊ดด ๊ฑฐ๋™์— ๋Œ€ํ•œ ๋ถ„์„์€ ๋งค์šฐ ๋ฏธ๋น„ํ•œ ์ˆ˜์ค€์ด๋‹ค [14,15]. ์ด์— ๋ณธ ์—ฐ๊ตฌ ์ €์ž๋“ค์€ N2 gas๋ฅผ ์ด์šฉํ•˜์—ฌ ์ œ์กฐ๋œ CSAM Cu์˜ ์••์ถ• ํŠน์„ฑ ๋ฐ ๋ณ€ํ˜• ๊ฑฐ๋™์— ๋Œ€ํ•˜์—ฌ ์ผ๋ถ€ ์—ฐ๊ตฌ๋ฅผ ์ˆ˜ํ–‰ํ•œ ๋ฐ” ์žˆ๋‹ค [16,17]. ๊ทธ๋Ÿฌ๋‚˜ CSAM Cu๋ฅผ ์‹ค์ œ ๊ตฌ์กฐ์šฉ ๋ถ€ํ’ˆ์œผ๋กœ ์‚ฌ์šฉํ•˜๊ธฐ ์œ„ํ•ด์„œ๋Š” ์••์ถ• ๋ฟ๋งŒ ์•„๋‹ˆ๋ผ ์ธ์žฅ ํŠน์„ฑ์— ๋Œ€ํ•œ ์—ฐ๊ตฌ๊ฐ€ ํ•„์ˆ˜์ ์œผ๋กœ ์ˆ˜ํ–‰๋˜์–ด์•ผ ํ•˜์ง€๋งŒ ํ˜„์žฌ๊นŒ์ง€ ์••์ถ•๊ณผ ์ธ์žฅ์—์„œ์˜ ๋ณ€ํ˜•/ํŒŒ๊ดด ์ฐจ์ด์— ๋Œ€ํ•œ ์—ฐ๊ตฌ๋Š” ์ „ํ˜€ ์ˆ˜ํ–‰๋œ ๋ฐ” ์—†๋‹ค.

๋”ฐ๋ผ์„œ ๋ณธ ์—ฐ๊ตฌ์—์„œ๋Š” CSAM Cu๋ฅผ ์ด์šฉํ•˜์—ฌ ์ˆœ์ˆ˜ ๊ตฌ๋ฆฌ๋ฒŒํฌ ์†Œ์žฌ๋ฅผ ์ œ์กฐํ•˜๊ณ , ์šฉ์‚ฌ ์ˆ˜์ง ๋ฐฉํ–ฅ์— ๋Œ€ํ•œ ๋งˆ์ดํฌ๋กœ ์ธ์žฅ ๋ฐ ์••์ถ• ์‹œํ—˜์„ ๊ฐ๊ฐ ์ˆ˜ํ–‰ํ•˜์˜€๋‹ค. ์ด์™€ ํ•จ๊ป˜ ์„œ๋กœ ๋‹ค๋ฅธ ์‘๋ ฅ ํ•˜์—์„œ์˜ ๋ณ€ํ˜• ์ „/ํ›„ ๋ฏธ์„ธ์กฐ์ง๊ณผ ํŒŒ๋‹จ๋ฉด ๊ด€์ฐฐ์„ ํ†ตํ•ด ์ตœ์ข…์ ์œผ๋กœ ์ƒ๊ธฐ ์†Œ์žฌ์˜ ๋ฏธ์„ธ์กฐ์ง, ๊ธฐ๊ณ„์  ํŠน์„ฑ, ๋ณ€ํ˜•/ํŒŒ๊ดด ๊ฑฐ๋™์˜ ์ƒ๊ด€ ๊ด€๊ณ„์— ๋ฏธ์น˜๋Š” ์ธ์žฅ-์••์ถ• ์‘๋ ฅ์˜ ์˜ํ–ฅ์„ ๊ทœ๋ช…ํ•˜๊ณ ์ž ํ•˜์˜€๋‹ค.

2. ์‹คํ—˜๋ฐฉ๋ฒ•

๊ทธ๋ฆผ 1(a)๋Š” ์ด๋ฒˆ ์—ฐ๊ตฌ์— ์ด์šฉํ•œ ์ˆœ๋„ 99% Cu ๋ถ„๋ง์˜ ํ˜•์ƒ์„ ๋ณด์—ฌ์ค€๋‹ค. ๋ถ„๋ง์˜ ๊ฒฝ์šฐ ๋Œ€๋ถ€๋ถ„ ๊ตฌํ˜•์œผ๋กœ ํ™•์ธ๋˜๋ฉฐ ๋ถ„๋ง ์ž…๋„ (powder particle) ๋ถ„ํฌ์™€ ํฌ๊ธฐ๋Š” 9-38 ฮผm, ํ‰๊ท  ์ž…๋„ (average particle size)๋Š” 27.7 ฮผm๋กœ ์ธก์ •๋˜์—ˆ๋‹ค. ์ด์™€ ํ•จ๊ป˜ ๋ถ„๋ง์˜ ์‚ฐ์†Œ ํ•จ๋Ÿ‰์„ ์ธก์ •ํ•ด ๋ณธ ๊ฒฐ๊ณผ 1661 ยฑ 96 ppm์œผ๋กœ ํ™•์ธ๋˜์—ˆ๋‹ค. High-resolution electron backscattered diffraction (HR-EBSD, Oxford, Nordlys nano detector)๋ฅผ ์ด์šฉํ•˜์—ฌ ๋ถ„๋ง์˜ grain orientation map์„ ๊ด€์ฐฐํ•œ ๊ฒฐ๊ณผ, ์ž…์ž ๋‚ด๋ถ€์˜ ํ‰๊ท  ๊ฒฐ์ •๋ฆฝ ํฌ๊ธฐ๋Š” ์•ฝ 6 ฮผm์ž„์„ ์•Œ ์ˆ˜ ์žˆ์—ˆ์œผ๋ฉฐ ๋ถ„๋ง ๋‚ด๋ถ€์— ์ผ๋ถ€ sigma 3 twin์ด ์ผ๋ถ€ ์กด์žฌํ•˜๋Š” ๊ฒƒ์œผ๋กœ ๋‚˜ํƒ€๋‚ฌ๋‹ค (๊ทธ๋ฆผ 1(b)). ์ด๋Ÿฌํ•œ Cu ๋ถ„๋ง์„ ์ด์šฉํ•˜์—ฌ Table 1์— ์ •๋ฆฌ๋œ ์ ์ • ๊ณต์ • ์กฐ๊ฑด์œผ๋กœ 30 mm์˜ ๊ฑฐ๋ฆฌ์—์„œ Al ๊ธฐ์ง€์— Cu ๋ถ„๋ง์„ ์ ์ธต์‹œ์ผฐ๋‹ค. ์‚ฌ์šฉ๋œ ๊ณต์ • ์กฐ๊ฑด์˜ ๊ฒฝ์šฐ ์ด์ „ ๋‹ค์–‘ํ•œ ์‚ฌ์ „ ์‹คํ—˜์„ ํ†ตํ•˜์—ฌ ์–ป์–ด์ง„ ์ตœ์  ์ œ์กฐ ์กฐ๊ฑด์ด๋‹ค. ์ด ๋•Œ converge-diverge๋ฅผ ํ†ตํ•ด ์ž…์ž ์†๋„๋ฅผ ๊ทน๋Œ€ํ™” ์‹œํ‚ค๋Š” de laval type nozzle๋ฅผ ์‚ฌ์šฉํ–ˆ์œผ๋ฉฐ ์†ก๊ธ‰ ๊ฐ€์Šค๋กœ๋Š” He์„ ์ด์šฉํ•˜์˜€๋‹ค.

Cold spray ๊ณต์ • ์ค‘ ์ดˆ๊ธฐ ์ž…์ž ๋‚ด์— ์กด์žฌํ•˜๋Š” ์ƒ ๋ฐ ๊ณต์ • ๋„์ค‘ ์‚ฐํ™”๋ฌผ ํ˜น์€ ๋ถˆ์ˆœ๋ฌผ ๋“ฑ์˜ ์ƒ ๋ณ€ํ™”๊ฐ€ ๋ฐœ์ƒํ•˜๋Š”์ง€ ์•Œ์•„๋ณด๊ธฐ ์œ„ํ•ด X-ray diffractometer (XRD Ultima IV, Cu Kฮฑ radiation, scan step size; 0.05 deg., scan rate; 2 deg. min-1)๋ฅผ ์ด์šฉํ•˜์—ฌ ์ƒ ๋ถ„์„์„ ์ˆ˜ํ–‰ํ•˜์˜€๋‹ค. ์ดˆ๊ธฐ ๋ฏธ์„ธ์กฐ์ง ๊ด€์ฐฐ์„ ์œ„ํ•ด ์ œ์กฐ๋œ ์†Œ์žฌ์˜ ์ˆ˜์ง ์ ˆ๋‹จ๋ฉด์„ silicon carbide paper (#100 ~ #2000) ๋ฐ 1 ฮผm ์ˆ˜์ค€์˜ diamond suspension์œผ๋กœ ๊ธฐ๊ณ„์  ์—ฐ๋งˆ๋ฅผ ์‹ค์‹œํ•˜์˜€๋‹ค. ์ด์™€ ํ•จ๊ป˜ cold spray ๊ณต์ • ์ค‘ ๋ฐœ์ƒํ•˜๋Š” ๊ฒƒ์œผ๋กœ ๋ณด๊ณ ๋˜๊ณ  ์žˆ๋Š” ๋™์  ์žฌ๊ฒฐ์ • ํ˜„์ƒ์„ ํ™•์ธํ•˜๊ณ ์ž ์•ž์„œ ์–ธ๊ธ‰ํ•œ ๊ธฐ๊ณ„์  ์—ฐ๋งˆ ํ›„ ์ตœ์ข…์ ์œผ๋กœ 0.04 ฮผm์˜ colloidal sillica๋ฅผ ์ด์šฉํ•˜์—ฌ ๊ฒฝ๋ฉด ์—ฐ๋งˆ๋ฅผ ์‹ค์‹œํ•˜์˜€๋‹ค. ๊ฒฝ๋ฉด ์—ฐ๋งˆ๋œ ์‹œํŽธ์— ๋Œ€ํ•˜์—ฌ step size 50 nm, 15 kV์˜ ์กฐ๊ฑดํ•˜์—์„œ EBSD ๋ถ„์„์„ ์ˆ˜ํ–‰ํ–ˆ์œผ๋ฉฐ EBSD data ๋ถ„์„์€ imaging microscopy software (AZtecHKL) ํ”„๋กœ๊ทธ๋žจ์„ ์ด์šฉํ•˜์˜€๋‹ค.

CSAM Cu์˜ ์‘๋ ฅ ๋ชจ๋“œ์— ๋”ฐ๋ฅธ ํŠน์„ฑ์„ ์—ฐ๊ตฌํ•˜๊ธฐ ์œ„ํ•ด ๋‘๊ป˜ ์ˆ˜์งํ•œ ๋ฐฉํ–ฅ์— ๋Œ€ํ•ด ์ธ์žฅ ์‹œํŽธ๊ณผ ์›ํ†ตํ˜• ์••์ถ• ์‹œํŽธ์„ ์ œ์ž‘ํ•˜์˜€๋‹ค. ์—ฌ๊ธฐ์„œ ์ธ์žฅ์€ ํŒ์ƒ์˜ ASTM D 1708 ๊ทœ๊ฒฉ์— ๋น„๋ก€ํ•˜๋Š” ์‹œํŽธ์„ ์ œ์ž‘ํ•˜๊ณ  MTS 810 ์žฅ๋น„๋ฅผ ์ด์šฉํ•˜์—ฌ 10-3/s์˜ ์ดˆ๊ธฐ ๋ณ€ํ˜•๋ฅ  ์†๋„ ์กฐ๊ฑด์—์„œ ์ˆ˜ํ–‰ํ•˜์˜€๋‹ค. ์••์ถ• ์‹œํŽธ์˜ ๊ฒฝ์šฐ ฮฆ 2 mm X 3 (height) mm์˜ ์›ํ†ตํ˜• ์‹œํŽธ์„ ์ œ์ž‘ํ–ˆ์œผ๋ฉฐ Gleeble Tester๋ฅผ ์ด์šฉํ•˜์˜€์œผ๋ฉฐ ์ดˆ๊ธฐ ๋ณ€ํ˜•๋ฅ  ์†๋„์กฐ๊ฑด 10-3/s์œผ๋กœ ฮตt = 0.9๊นŒ์ง€ ์••์ถ• ์‹œํ—˜์„ ์ง„ํ–‰ํ•˜์˜€๋‹ค.

3. ์‹คํ—˜๊ฒฐ๊ณผ ๋ฐ ๊ณ ์ฐฐ

3.1. ์ดˆ๊ธฐ ๋ฏธ์„ธ์กฐ์ง

๊ทธ๋ฆผ 2๋Š” ์ œ์กฐ๋œ CSAM Cu์˜ ๊ฑฐ์‹œ์  ์ด๋ฏธ์ง€๋กœ์จ ๊ฐ€๋กœ 36 mm, ๋„ˆ๋น„ 22 mm, ๋‘๊ป˜ 4 mm๋กœ ์ธก์ •๋˜์—ˆ๋‹ค. ์‹œํŽธ์˜ ์ด๋ฏธ์ง€ ๊ด€์ฐฐ ๊ฒฐ๊ณผ, ๋ชจ์žฌ์ธ Al๊ณผ์˜ ๋ฐ•๋ฆฌ ํ˜„์ƒ์€ ๋‚˜ํƒ€๋‚˜์ง€ ์•Š์•˜์œผ๋ฉฐ Cu ์ฝ”ํŒ… ์ธต ๋‚ด ๊ท ์—ด์€ ํ˜•์„ฑ๋˜์ง€ ์•Š์•˜๋‹ค. ์ฆ‰ CSAM ๊ณต์ •์„ ํ†ตํ•ด ์„ฑ๊ณต์ ์œผ๋กœ ๋ฒŒํฌ ํ˜•ํƒœ์˜ Cu๋ฅผ ์ œ์กฐํ•  ์ˆ˜ ์žˆ๋Š” ๊ฒƒ์œผ๋กœ ํ™•์ธ๋˜์—ˆ๋‹ค. ์ด์™€ ํ•จ๊ป˜ CSAM ํ›„ ์ƒ๋Œ€ ๋ฐ€๋„๋ฅผ ์ธก์ •ํ•œ ๊ฒฐ๊ณผ 99.10%๋ฅผ ๋‚˜ํƒ€๋‚ด์–ด ์ „ํ†ต์ ์ธ ์ œ์กฐ ๊ณต์ •์œผ๋กœ ๋งŒ๋“ค์–ด์ง„ Cu์™€ ์œ ์‚ฌํ•œ ์ˆ˜์ค€์„ ๋ณด์ด๋Š” ๊ฒƒ์œผ๋กœ ๋‚˜ํƒ€๋‚ฌ๋‹ค.

๊ทธ๋ฆผ 3(a)๋Š” ์ดˆ๊ธฐ Cu ๋ถ„๋ง๊ณผ CSAM ๋ฒŒํฌ Cu์˜ X-ray ํšŒ์ ˆ ํŒจํ„ด ๋ถ„์„ ๊ฒฐ๊ณผ๋กœ CSAM ํ›„์—๋„ ์ดˆ๊ธฐ ๋ถ„๋ง์—์„œ ๊ฒ€์ถœ๋œ ฮฑ-Cu ๋‹จ์ƒ์ด ์œ ์ง€๋˜์—ˆ๊ณ  ์ƒ ๋ณ€ํ™”๋Š” ๋‚˜ํƒ€๋‚˜์ง€ ์•Š์•˜๋‹ค. ์ด๋Ÿฌํ•œ ์ด์œ ๋Š” ์šฉ์œต ๋ฐ ์‘๊ณ ๋ฅผ ํ†ตํ•ด ์ ์ธต์‹œํ‚ค๋Š” ์ผ๋ฐ˜์ ์ธ ์šฉ์‚ฌ ์ฝ”ํŒ… ๊ณต์ •๊ณผ๋Š” ๋‹ฌ๋ฆฌ CSAM์€ ๊ณ ์˜จ์˜ ์—ด์›์„ ํ•„์š”๋กœ ํ•˜์ง€ ์•Š๊ณ , ๋ถ„๋ง์„ ๊ณ ์ƒ ์ƒํƒœ์—์„œ ์†Œ์„ฑ ๋ณ€ํ˜•๋งŒ์„ ์ด์šฉํ•˜์—ฌ ๋ถ„๋ง์„ ์ ์ธตํ•˜๋Š” ๊ธฐ์ˆ ์ด๊ธฐ ๋•Œ๋ฌธ์ด๋‹ค [18]. ํ•œํŽธ, CSAM ์ „/ํ›„ ๋ถ„๋ง๊ณผ ๋ฒŒํฌ ์†Œ์žฌ์˜ ์ „์œ„ ๋ฐ€๋„๋ฅผ ์ธก์ •ํ•˜๊ธฐ ์œ„ํ•˜์—ฌ Ungar ๋“ฑ [19,20]์ด ์ œ์‹œํ•œ modified Williamson-Hall plot์„ ์ด์šฉํ–ˆ์œผ๋ฉฐ ์ด๋Š” ์•„๋ž˜์™€ ๊ฐ™์€ Eq. (1)์œผ๋กœ ํ‘œํ˜„๋œ๋‹ค:

(1)
ฮ” K   =   0 . 9 d   +   ฯ€ M 2   b 2 2 ฯ 1 2 ( K 2   C )   +   O ( K 4   C 2 )

์—ฌ๊ธฐ์„œ ฮ”ฮธ ๋ฐ ฮธ๋Š” ๊ฐ๊ฐ ํšŒ์ ˆ๊ฐ (diffraction angle) ๊ณผ ๋ฐ˜์น˜ํญ (full width of half maximum)์ด๋‹ค. ์ด์™€ ํ•จ๊ป˜, b๋Š” ๋ฒ„๊ฑฐ์Šค ๋ฒกํ„ฐ, d๋Š” ํ‰๊ท  ์ž…์ž ํฌ๊ธฐ ๊ทธ๋ฆฌ๊ณ  ฯ๋Š” ์ „์œ„ ๋ฐ€๋„์ด๋‹ค. M์€ ์ „์œ„์˜ effective outer cut-off radius์— ๋Œ€ํ•œ ์ƒ์ˆ˜, O๋Š” ์ƒ์ˆ˜ ๊ทธ๋ฆฌ๊ณ  M์€ 1-2 ์‚ฌ์ด ๊ฐ’์„ ๊ฐ€์ง„๋‹ค [20].

C๋Š” ์•„๋ž˜์˜ Eq. (2)๋ฅผ ํ†ตํ•ด ๊ฐ™์ด ๊ณ„์‚ฐ๋  ์ˆ˜ ์žˆ๋‹ค:

(2)
C   =   C h 00 ( 1 - q H 2 )
(3)
H 2   =   h 2 k 2   +   k 2 l 2   +   l 2 h 2 ( h 2   +   k 2   +   l 2 )

์—ฌ๊ธฐ์„œ Ch00๋Š” h00 reflection์— ๋Œ€ํ•œ average contrast factor์ด๋ฉฐ Cu์˜ h00 ๊ฐ’์€ 0.3065๋กœ ๊ณ„์‚ฐ๋œ๋‹ค [18]. q๋Š” edge, screw ๋ฐ mixed character์— ๋Œ€ํ•œ ๊ฐ’์œผ๋กœ์จ (ฮ”K2-ฮฑ)/K2 and H2 plot์„ ํ†ตํ•ด ๊ณ„์‚ฐ๋  ์ˆ˜ ์žˆ๋‹ค (Eq. (3)). ์ตœ์ข…์ ์œผ๋กœ modified Williamson-Hall plot์„ ํ†ตํ•ด m์„ ์–ป์€ ๋’ค ฯ = 2m2/(ฯ€M2b2)๋กœ ์ „์œ„ ๋ฐ€๋„๋ฅผ ์ธก์ •ํ•˜์˜€๋‹ค. ๊ทธ๋ฆผ 3(b)์— ๋„์‹œํ•œ ฮ”K vs. KC1/2๋กœ ์˜ˆ์ธก๋œ ์ดˆ๊ธฐ Cu ๋ถ„๋ง๊ณผ CSAM Cu์˜ ํ‰๊ท  ์ „์œ„ ๋ฐ€๋„๋Š” ๊ฐ๊ฐ 3.60 ร— 1013/m2, 2.36 ร— 1014/m2๋กœ ์ธก์ •๋˜์–ด CSAM ํ›„ ์ „์œ„ ๋ฐ€๋„๋Š” ์•ฝ 6.5๋ฐฐ ์ฆ๊ฐ€ํ•œ ๊ฒƒ์œผ๋กœ ํ™•์ธ๋˜์—ˆ๋‹ค. ์ด๋Š” CSAM ์ค‘ ์ดˆ์Œ์†์œผ๋กœ ๋ถ„๋ง์ด ๋ชจ์žฌ์— ์ ์ธต๋˜๋Š” ๊ณผ์ •์—์„œ ๊ฐ๊ฐ์˜ ๋ถ„๋ง์ด ๊ฐ•์†Œ์„ฑ ๋ณ€ํ˜•ํ•˜๊ธฐ ๋•Œ๋ฌธ์œผ๋กœ ์‚ฌ๋ฃŒ๋œ๋‹ค.

๊ทธ๋ฆผ 4๋Š” CSAM Cu์˜ EBSD ๋ถ„์„ ๊ฒฐ๊ณผ๋ฅผ ๋ณด์—ฌ์ค€๋‹ค. ๋จผ์ €, ๊ฒฐ์ • ๋ฐฉ์œ„ ๋งต (grain orientation map) ๋ถ„์„ ๊ฒฐ๊ณผ(a), ๋ฌธํ—Œ ์ƒ์— ๋ณด๊ณ ๋œ ๊ฒƒ๊ณผ ๊ฐ™์ด ๋ถ„๋ง ๋‚ด๋ถ€์—๋Š” ์ƒ๋Œ€์ ์œผ๋กœ ์กฐ๋Œ€ํ•œ ๊ฒฐ์ •๋ฆฝ์ด, ๋ถ„๋ง ๊ณ„๋ฉด์—์„œ๋Š” ์ˆ˜ ๋ฐฑ nm ํฌ๊ธฐ์˜ ๋ฏธ์„ธ ๊ฒฐ์ •๋ฆฝ์ด ๊ด€์ฐฐ๋˜์–ด heterogeneous grain structure๋ฅผ ๊ฐ€์ง€๋Š” ๊ฒƒ์œผ๋กœ ํ™•์ธ๋˜์—ˆ๋‹ค [21,22]. ์ด์™€ ํ•จ๊ป˜ ํ‰๊ท  ๊ฒฐ์ •๋ฆฝ ํฌ๊ธฐ๋Š” 1.42 ฮผm๋กœ ์–ป์–ด์กŒ๋‹ค. ๊ฐ ๊ฒฐ์ •๋ฆฝ ๊ฐ„์˜ misorientation angle ๊ด€๊ณ„๋ฅผ ํ†ตํ•ด ์žฌ๊ฒฐ์ • ๋ถ„์œจ ๋งต (recrystallized fraction map)์„ ๋ถ„์„ํ•˜๊ณ  ๊ทธ ๊ฒฐ๊ณผ๋ฅผ (b)์— ๋„์‹œํ•˜์˜€๋‹ค. ์—ฌ๊ธฐ์„œ ์‚ฌ์šฉ๋œ ์žฌ๊ฒฐ์ • ๋ถ„์œจ ๋งต์€ ๊ฒฐ์ •๋ฆฝ ๋‚ด๋ถ€ average angle๊ณผ misorientation angle๊ฐ„์˜ ์ƒ๊ด€ ๊ด€๊ณ„๋ฅผ ์ด์šฉํ•˜์—ฌ ์žฌ๊ฒฐ์ • ์ •๋„๋ฅผ ํ‘œํ˜„ํ•˜๋Š” ๋ฐฉ๋ฒ•์ด๋‹ค. ๋นจ๊ฐ„์ƒ‰์œผ๋กœ ํ‘œ์‹œ๋œ ์˜์—ญ์€ deformed structure๋กœ ๊ฒฐ์ •๋ฆฝ ๋‚ด๋ถ€ average angle์ด ์ € ๊ฒฝ๊ฐ๊ณ„๋กœ ๊ตฌ๋ถ„๋˜๋Š” 2ยฐ ์ด์ƒ์ธ ๊ฒฝ์šฐ์— ํ•ด๋‹น๋˜๋ฉฐ, ๋…ธ๋ž€์ƒ‰์œผ๋กœ ํ‘œ์‹œ๋œ ์˜์—ญ์€ substructured area๋กœ average angle์€ 2ยฐ ์ดํ•˜์ด๋‚˜ ๊ฒฐ์ •๋ฆฝ ๋‚ด๋ถ€์— ์กด์žฌํ•˜๋Š” subgrain๊ฐ„ misorientation์ด 2ยฐ ์ด์ƒ์ผ ๊ฒฝ์šฐ์— ํ•ด๋‹น๋œ๋‹ค. ๋งˆ์ง€๋ง‰์œผ๋กœ ํŒŒ๋ž€์ƒ‰์œผ๋กœ ํ‘œ์‹œ๋œ ์˜์—ญ์€ fully recrystallized area๋กœ ๊ฒฐ์ •๋ฆฝ ๋‚ด๋ถ€๊ฐ€ ๊ฑฐ์˜ ํ•˜๋‚˜์˜ ๊ฒฐ์ • ๋ฐฉ์œ„๋กœ ์ด๋ฃจ์–ด์ ธ ์žˆ๋Š” ์˜์—ญ์ด๋‹ค. ์•ž์„  ๊ฐœ๋…์„ ๋„์ž…ํ•˜์—ฌ ์žฌ๊ฒฐ์ • ์ •๋„๋ฅผ ๋ถ„์„ํ•ด ๋ณธ ๊ฒฐ๊ณผ, fully recrystallized ๋ฐ substructured๋Š” ๊ฐ๊ฐ 25%, 15%๋กœ ์ „์ฒด์˜ ์•ฝ 40%๊ฐ€๋Ÿ‰์„ ์ฐจ์ง€ํ•˜๋ฉฐ, ๋Œ€๋ถ€๋ถ„ ๋ถ„๋ง ๊ณ„๋ฉด์„ ๋”ฐ๋ผ ์ง‘์ค‘์ ์œผ๋กœ ๊ด€์ฐฐ๋˜์—ˆ๋‹ค. ์ฆ‰ ๋ถ„๋ง ๊ณ„๋ฉด์—์„œ๋Š” ๋ฏธ์„ธ์กฐ์ง์  ๋ณ€ํ™”๊ฐ€ ๋ฐœ์ƒํ•œ ๊ฒƒ์„ ์•Œ ์ˆ˜ ์žˆ์œผ๋ฉฐ ์ด๋Ÿฌํ•œ ์›์ธ์€ ๋™์  ์žฌ๊ฒฐ์ • (dynamic recrystallization, DRX) ํ˜„์ƒ์— ๊ธฐ์ธํ•˜๋Š” ๊ฒƒ์œผ๋กœ ์•Œ๋ ค์ ธ์žˆ๋‹ค [23].

Cold spray ๊ณต์ • ์ค‘ ๋™์  ์žฌ๊ฒฐ์ • ํ˜„์ƒ์ด ๋ฐœ์ƒํ•˜๋Š” ์ด์œ ์— ๋Œ€ํ•ด์„œ๋Š” ๋‹ค์–‘ํ•œ ์—ฐ๊ตฌ์ž๋“ค์— ์˜ํ•ด ๋ณด๊ณ ๋œ ๋ฐ” ์žˆ๋‹ค. ๋จผ์ € Stoltenhoff ๋“ฑ [14] ๋ฐ Bae ๋“ฑ [3]์— ๋”ฐ๋ฅด๋ฉด ๋งˆํ•˜์˜ ์†๋„๋กœ ๋ถ„๋ง์ด ๋ชจ์žฌ ๋ฐ ๋ถ„๋ง์— ์ ์ธต๋˜๋Š” ๊ณผ์ •์—์„œ ๋ฐœ์ƒํ•œ ์—ด์€ ์™ธ๋ถ€๋กœ ๋ฐฉ์ถœ๋˜์ง€ ๋ชปํ•˜๊ณ  ๋ถ„๋ง ๊ณ„๋ฉด ์˜์—ญ์— adiabatic shear instability (ASI)๋ผ ๋ถˆ๋ฆฌ๋Š” ์—ด์  ํ™œ์„ฑํ™” ์˜์—ญ์„ ๋ฐœ์ƒํ•œ๋‹ค. King ๋“ฑ [24]์˜ ์—ฐ๊ตฌ ๊ฒฐ๊ณผ์— ๋”ฐ๋ฅด๋ฉด cold sprayed Cu์˜ ๋ถ„๋ง ๋‚ด๋ถ€ ๋ฐ ๊ณ„๋ฉด์—์„œ์˜ ํ‰๊ท  ๋ณ€ํ˜•๋Ÿ‰ ์ฐจ์ด๋Š” ์•ฝ 3๋ฐฐ ์ด์ƒ์œผ๋กœ ๋ถ„๋ง ๊ณ„๋ฉด์—์„œ ๊ทน์‹ฌํ•œ ๋ณ€ํ˜•์ด ๋ฐœ์ƒํ•œ๋‹ค. ์ฆ‰, ๋ถ„๋ง์ด ์ดˆ์Œ์†์œผ๋กœ ๋ชจ์žฌ ๋ฐ ๋ถ„๋ง๊ณผ ์ถฉ๋Œํ•˜๋Š” ๊ณผ์ •์—์„œ ๋ฐœ์ƒํ•œ ์‹ฌํ•œ ๋ณ€ํ˜•๊ณผ ์—ด ์—๋„ˆ์ง€๋Š” ๋ถ„๋ง ๊ณ„๋ฉด์„ ์—ด์—ญํ•™์ ์œผ๋กœ ๋งค์šฐ ๋ถˆ์•ˆ์ •ํ•œ ์ƒํƒœ๋กœ ๋งŒ๋“ค๊ฒŒ ๋œ๋‹ค. ๋”ฐ๋ผ์„œ, ์ด๋Ÿฌํ•œ ๋ถˆ์•ˆ์ •ํ•œ ์ƒํƒœ๋ฅผ ํ•ด์†Œํ•˜๊ณ ์ž ๋ถ„๋ง ๊ณ„๋ฉด ์˜์—ญ์—์„œ ๋™์  ์žฌ๊ฒฐ์ • ํ˜„์ƒ์ด ๋ฐœ์ƒํ•˜๊ณ , ๊ทธ ๊ฒฐ๊ณผ ๋ถˆ๊ท ์ผํ•œ ๊ฒฐ์ •๋ฆฝ ๊ตฌ์กฐ (heterogeneous grain structure)๊ฐ€ ํ˜•์„ฑ๋˜๋Š” ๊ฒƒ์œผ๋กœ ์‚ฌ๋ฃŒ๋œ๋‹ค. ์—ฌ๊ธฐ์„œ ์ฃผ์˜ํ•ด์•ผ ํ•  ์ ์€ ๋ถ„๋ง์˜ ์ถฉ๋Œ ๊ณผ์ • ์ค‘ ์ˆœ๊ฐ„ ์ตœ๋Œ€ ์˜จ๋„๋Š” ์•ฝ 200 oC ์ˆ˜์ค€์œผ๋กœ ์•Œ๋ ค์ ธ ์žˆ์œผ๋ฉฐ, ์ˆœ์ˆ˜ Cu์˜ ์žฌ๊ฒฐ์ • ์˜จ๋„๋ฅผ ๊ณ ๋ คํ•ด ๋ณผ ๋•Œ ์ •์  ์žฌ๊ฒฐ์ • (static recrystallization, SRX) ํ˜„์ƒ์— ์˜ํ•œ ์žฌ๊ฒฐ์ •์€ ๋ฐœ์ƒํ•˜์ง€ ์•Š๋Š” ๊ฒƒ์œผ๋กœ ์ƒ๊ฐ๋œ๋‹ค [25]. ๋”ฐ๋ผ์„œ, heterogeneous grain structure๋Š” ๋™์  ์žฌ๊ฒฐ์ • ํ˜„์ƒ์— ๊ธฐ์ธํ•œ ๊ฒƒ์œผ๋กœ ์‚ฌ๋ฃŒ๋˜๋ฉฐ ์ด๋Ÿฌํ•œ ํ˜„์ƒ์€ ์ผ๋ถ€ ๊ฐ•์†Œ์„ฑ ๊ฐ€๊ณต๋ฒ• (severe plastic deformation, SPD)์œผ๋กœ ์ œ์กฐ๋œ ์†Œ์žฌ [26,27]์™€ cold sprayed materials์—์„œ ์ข…์ข… ๋ฐœ์ƒํ•˜๋Š” ๊ฒƒ์œผ๋กœ ๋ณด๊ณ ๋˜๊ณ  ์žˆ๋‹ค [23,28].

3.2. ์ธ์žฅ ๋ฐ ์••์ถ• ํŠน์„ฑ

๊ทธ๋ฆผ 5๋Š” CSAM Cu์˜ ์ธ์žฅ ๋ฐ ์••์ถ• ์‹œํ—˜์— ๋Œ€ํ•œ ์‘๋ ฅ-๋ณ€ํ˜•๋ฅ  ๊ณก์„ ๋“ค์ด๋‹ค. ํ•ญ๋ณต ๊ฐ•๋„ ์ธก์ • ๊ฒฐ๊ณผ, ์ธ์žฅ-์••์ถ• ๋‘ ์กฐ๊ฑด ๋ชจ๋‘ ์•ฝ 415 MPa์˜ ๋งค์šฐ ๋†’์€ ํ•ญ๋ณต ๊ฐ•๋„๋“ค (yield strengths)์„ ๋ณด์˜€๋‹ค. ์ด๋Š” ์šฐ์ˆ˜ํ•œ ๊ธฐ๊ณ„์  ํŠน์„ฑ์„ ๋ณด์ด๋Š” ๊ฒƒ์œผ๋กœ ์•Œ๋ ค์ง„ ๊ฐ•์†Œ์„ฑ ๊ฐ€๊ณต๋ฒ•, equal channel angular pressing (ECAP) ํ˜น์€ high pressure torsion (HPT)์œผ๋กœ ์ œ์กฐ๋œ Cu์™€ ๋น„๊ตํ•˜์—ฌ ์œ ์‚ฌํ•˜๊ฑฐ๋‚˜ ๋ณด๋‹ค ๋†’์€ ์ˆ˜์ค€์œผ๋กœ ํ™•์ธ๋˜์—ˆ๋‹ค [27,29]. ๋˜ํ•œ ์ธ์žฅ ๋ฐ ์••์ถ• ๋ฐฉํ–ฅ์— ๋”ฐ๋ผ ํ•ญ๋ณต๊ฐ•๋„์˜ ์ฐจ์ด๋Š” ๋‚˜ํƒ€๋‚˜์ง€ ์•Š์•˜์œผ๋ฉฐ ์ด๋ฅผ ํ†ตํ•ด ์†Œ์„ฑ ๋ณ€ํ˜•์ด ๋ฐœ์ƒํ•˜๊ธฐ ์ „๊นŒ์ง€ tension-compression asymmetry๋Š” ๊ฑฐ์˜ ์—†๋Š” ๊ฒƒ์„ ์•Œ ์ˆ˜ ์žˆ์—ˆ๋‹ค.

๋ณธ ์ €์ž๋“ค์€ ์ด์ „ ์—ฐ๊ตฌ์—์„œ N2 carrier gas๋กœ ์ œ์กฐํ•œ CSAM Cu์˜ ์••์ถ• ์‹œํ—˜์„ ํ†ตํ•ด cold sprayed materials์˜ ์šฐ์ˆ˜ํ•œ ๊ธฐ๊ณ„์  ํŠน์„ฑ์— ๋Œ€ํ•ด ์ผ๋ถ€ ์—ฐ๊ตฌ-์ œ์‹œํ•œ ๋ฐ” ์žˆ๋‹ค [17]. CSAM์˜ ๋›ฐ์–ด๋‚œ ๊ธฐ๊ณ„์  ํŠน์„ฑ์€ 1) ๋ถ„๋ง ์ ์ธต ๊ณผ์ •์—์„œ ๊ธ‰๊ฒฉํžˆ ์ฆ๊ฐ€ํ•˜๋Š” ๋‚ด๋ถ€ ์ „์œ„ ๋ฐ€๋„, 2) ๋ฏธ์„ธ ๊ฒฐ์ •๋ฆฝ ํฌ๊ธฐ์— ๊ธฐ์ธํ•˜๋Š” ๊ฒƒ์œผ๋กœ ํ•ด์„๋˜์—ˆ๋‹ค. ์ฆ‰ ๊ฐ•์†Œ์„ฑ ๋ณ€ํ˜•์— ์˜ํ•ด ์ฆ๊ฐ€๋œ ์ „์œ„๋ฟ๋งŒ ์•„๋‹ˆ๋ผ DRX ํ˜„์ƒ์œผ๋กœ ๋ถ„๋ง ๊ณ„๋ฉด์— ์ƒ์„ฑ๋œ ์ˆ˜ ๋ฐฑ nm ํฌ๊ธฐ์˜ ๊ฒฐ์ •๋ฆฝ์ด Hall-Petch ๊ด€๊ณ„์— ๋”ฐ๋ผ ์ƒ๊ธฐ ์†Œ์žฌ์˜ ๊ธฐ๊ณ„์  ํŠน์„ฑ์„ ๋ณด๋‹ค ํ–ฅ์ƒ์‹œํ‚จ ๊ฒƒ์œผ๋กœ ์„ค๋ช…๋  ์ˆ˜ ์žˆ๋‹ค [17]. ์ด์™€ ํ•จ๊ป˜, ์ผ๋ฐ˜์ ์œผ๋กœ SRX ํ˜„์ƒ์œผ๋กœ ์ƒ์„ฑ๋œ ๊ฒฐ์ •๋ฆฝ์˜ ๊ฒฝ์šฐ ๋‚ด๋ถ€ ์ „์œ„ ๋ฐ€๋„๊ฐ€ ๋งค์šฐ ๋‚ฎ์œผ๋ฉฐ ๊ฐ•๋„๋ฅผ ํฌ๊ฒŒ ๊ฐ์†Œ์‹œํ‚ฌ ์ˆ˜ ์žˆ๋‹ค [30]. ๊ทธ๋Ÿฌ๋‚˜, Zou ๋“ฑ [31]์€ ์ผ๋ถ€ cold spray ๊ณต์ •์œผ๋กœ ์ œ์กฐ๋œ ์†Œ์žฌ์˜ ๊ฒฝ์šฐ ๋ถ„๋ง ๊ณ„๋ฉด์—์„œ ์ƒ์„ฑ๋˜๋Š” ์ˆ˜๋ฐฑ nm ํฌ๊ธฐ์˜ ๊ฒฐ์ •๋ฆฝ์ด ๋‚ด๋ถ€ ์กฐ๋Œ€ ๊ฒฐ์ •๋ฆฝ๊ณผ ๋น„๊ตํ•˜์—ฌ ๋†’์€ indentation hardness ๊ฐ’์„ ๊ฐ€์ง„๋‹ค๊ณ  ๋ณด๊ณ ํ•œ ๋ฐ” ์žˆ๋‹ค. ์ฆ‰, SRX์™€๋Š” ๋‹ฌ๋ฆฌ cold spray ๊ณต์ •์—์„œ ๋ฐœ์ƒํ•˜๋Š” DRX์— ์˜ํ•ด ์ƒ์„ฑ๋œ ๋ฏธ์„ธ ๊ฒฐ์ •๋ฆฝ์€ ์ „์œ„ ๋ฐ€๋„๊ฐ€ ๋†’์€ ์กฐ๋Œ€ ๊ฒฐ์ •๋ฆฝ ๋ณด๋‹ค ๋ณ€ํ˜•์— ๋Œ€ํ•œ ์ €ํ•ญ์„ฑ์ด ๋†’๊ณ , ๊ทธ๋ฆผ 4์— ๋‚˜ํƒ€๋‚ธ ๋ฐ”์™€ ๊ฐ™์ด ๋†’์€ ๋ถ„์œจ์„ ์ฐจ์ง€ํ•จ์œผ๋กœ์จ ์ƒ๊ธฐ ์†Œ์žฌ์˜ ๊ณ  ๊ฐ•๋„ํ™”์— ์ฃผ์š”ํ•œ ์š”์ธ์ด ๋˜๋Š” ๊ฒƒ์œผ๋กœ ํŒ๋‹จ๋œ๋‹ค.

3.3. ์ธ์žฅ ๋ฐ ์••์ถ• ๋ณ€ํ˜• ๊ฑฐ๋™

์‘๋ ฅ-๋ณ€ํ˜•๋ฅ  ๊ณก์„  ์ƒ ๋จผ์ € ์ฃผ๋ชฉํ•ด ๋ณผ ์ ์€ ์ธ์žฅ ์‹œํ—˜ ์ค‘ ๋ฐœ์ƒํ•˜๋Š” ์†Œ์„ฑ ๋ณ€ํ˜•์ด๋‹ค. ์ผ๋ฐ˜์ ์œผ๋กœ cold spray ๊ธˆ์† ์†Œ์žฌ์— ๋Œ€ํ•œ ๋งˆ์ดํฌ๋กœ ์ธ์žฅ ์‹œํ—˜์—์„œ๋Š” ๋Œ€๋ถ€๋ถ„ ํ•ญ๋ณต ์ ์„ ์ง€๋‚˜์ง€ ๋ชปํ•˜๊ณ  ํŒŒ๋‹จ์ด ๋ฐœ์ƒํ•˜๋Š” ๊ฒƒ์œผ๋กœ ๋ณด๊ณ ๋˜๊ณ  ์žˆ๋‹ค [15,32]. ๊ทธ๋Ÿฌ๋‚˜, ๋ณธ ์—ฐ๊ตฌ์—์„œ๋Š” ํฅ๋ฏธ๋กญ๊ฒŒ๋„ ์ธ์žฅ ์‹œํ—˜ ์ค‘ ํ•ญ๋ณต ๊ฐ•๋„๊นŒ์ง€ ์†Œ์žฌ๊ฐ€ ์‘๋ ฅ์„ ์ˆ˜์šฉํ•˜๋ฉฐ, ์ผ๋ถ€ ์†Œ์„ฑ ๋ณ€ํ˜•์ด ๋ฐœ์ƒํ•˜๋Š” ๊ฒƒ์œผ๋กœ ๋‚˜ํƒ€๋‚ฌ๋‹ค. ์ด์— ๋”ฐ๋ผ CSAM Cu๊ฐ€ ์ธ์žฅ ์‹œํ—˜ ์ค‘ ์‹ค์ œ ๋ณ€ํ˜•์„ ์ˆ˜์šฉํ•  ์ˆ˜ ์žˆ๋Š” ์ง€ ์•Œ์•„๋ณด๊ธฐ ์œ„ํ•ด ํŒŒ๋‹จ๋œ ์‹œํŽธ์— ๋Œ€ํ•ด ์ˆ˜์ง ์ ˆ๋‹จ ํ›„ EBSD ๋ถ„์„์„ ์ˆ˜ํ–‰ํ–ˆ์œผ๋ฉฐ ๊ทธ ๊ฒฐ๊ณผ๋ฅผ ๊ทธ๋ฆผ 6์— ๋„์‹œํ•˜์˜€๋‹ค. ๊ฒฐ์ • ๋ฐฉ์œ„ ๋งต ๋ถ„์„ ๊ฒฐ๊ณผ, ํŒŒ๋‹จ๋ฉด ๋ถ€๊ทผ์—์„œ ์ธ์žฅ ์‘๋ ฅ์ด ๊ฐ€ํ•ด์ง€๋Š” ๋ฐฉํ–ฅ์œผ๋กœ ๊ฒฐ์ •๋ฆฝ๋“ค์ด ์ผ๋ถ€ ์—ฐ์‹ ๋œ ํ˜•ํƒœ๋ฅผ ๋ณด์˜€์œผ๋ฉฐ ๋‹ค๋Ÿ‰์˜ ์ € ๊ฒฝ๊ฐ ๊ฒฝ๊ณ„ (low angle boundary, LAB-white line)๊ฐ€ ๊ด€์ฐฐ๋˜์—ˆ๋‹ค. ์ฆ‰, He์„ ํ†ตํ•ด ๋†’์€ gas velocity๋ฅผ ๋ถ€์—ฌํ•ด์ค€ ๊ฒฝ์šฐ ๊ฑด์ „ํ•œ CSAM Cu๋ฅผ ์ œ์กฐํ•  ์ˆ˜ ์žˆ์œผ๋ฉฐ, ์ธ์žฅ ์‹œํ—˜์—์„œ ํ•ญ๋ณต ์‘๋ ฅ๊นŒ์ง€ ์œ ์ง€ํ•  ์ˆ˜ ์žˆ๋Š” ๊ฒƒ์œผ๋กœ ํ™•์ธ๋˜์—ˆ๋‹ค. ์ด์™€ ๋”๋ถˆ์–ด, ์ ์ • ๊ณต์ •์กฐ๊ฑด ์ œ์–ด๋Š” ํ•ญ๋ณต ์‘๋ ฅ ์ดํ›„ ์ผ๋ถ€ ๋ณ€ํ˜• ์ˆ˜์šฉ์„ ๊ฐ€๋Šฅ์ผ€ํ•˜๋Š” ๊ฒƒ์œผ๋กœ ๋‚˜ํƒ€๋‚ฌ๋‹ค. ๋”ฐ๋ผ์„œ ์•ž์„  ๊ฒฐ๊ณผ๋“ค์„ ํ† ๋Œ€๋กœ ์ตœ๊ทผ๊นŒ์ง€ ์ˆ˜๋งŽ์€ ์˜๋ฌธ์ด ์ œ๊ธฐ๋˜์–ด์ ธ ์™”๋˜ ์ธ์žฅ-์••์ถ•์—์„œ์˜ ๊ฐ•๋„ ์ฐจ์ด๋Š” ํฌ์ง€ ์•Š์€ ๊ฒƒ์„ ์•Œ ์ˆ˜ ์žˆ์—ˆ๋‹ค. ๋˜ํ•œ, ์ ์ • ์กฐ๊ฑด ๋„์ถœ์„ ํ†ตํ•ด ์ธ์žฅ ์‹œํ—˜์—์„œ๋„ ์ผ๋ถ€ ์†Œ์„ฑ ๋ณ€ํ˜•์„ ์ˆ˜์šฉ ๊ฐ€๋Šฅ์ผ€ํ•˜์—ฌ ๊ตฌ์กฐ ์žฌ๋ฃŒ๋กœ์˜ ์ ์šฉ ๊ฐ€๋Šฅ์„ฑ์„ ํ™•์ธํ•  ์ˆ˜ ์žˆ์—ˆ๋‹ค.

ํ•œํŽธ, ์••์ถ• ์‘๋ ฅ-๋ณ€ํ˜•๋ฅ  ๊ณก์„  ์ƒ ์ฃผ๋ชฉํ•  ์ ์€ ์••์ถ• ๋ณ€ํ˜•์ค‘ ๊ทน๋Œ€ ์‘๋ ฅ (peak stress) ์ดํ›„ ๋ฐœ์ƒํ•˜๋Š” ๊ฐ€๊ณต ์—ฐํ™” ํ˜„์ƒ์ด๋‹ค. ์ผ๋ฐ˜์ ์œผ๋กœ ๊ฐ€๊ณต ์—ฐํ™” ํ˜„์ƒ์€ ๊ณ ์˜จ์—์„œ ๋ฐœ์ƒํ•˜๋ฉฐ, ์ƒ์˜จ์—์„œ๋Š” ์‰ฝ๊ฒŒ ๋‚˜ํƒ€๋‚˜์ง€ ์•Š๋Š” ๊ฒƒ์œผ๋กœ ์•Œ๋ ค์ ธ ์žˆ๋‹ค. ๊ทธ๋Ÿฌ๋‚˜, ์ผ๋ถ€ ๊ฐ•์†Œ์„ฑ ๊ฐ€๊ณต๋ฒ•์œผ๋กœ ์ œ์กฐ๋œ ์†Œ์žฌ์˜ ๊ฒฝ์šฐ ์ผ์ • ๋ณ€ํ˜•๋Ÿ‰ ์ดํ›„ ๋™์  ํšŒ๋ณต ๋ฐ ๋™์  ์žฌ๊ฒฐ์ • ํ˜„์ƒ์˜ ๋ฐœ์ƒ์œผ๋กœ ๊ฐ€๊ณต ์—ฐํ™” ํ˜„์ƒ์ด ๋ฐœ์ƒํ•œ๋‹ค๋Š” ์—ฐ๊ตฌ ๊ฒฐ๊ณผ๊ฐ€ ๋ณด๊ณ ๋˜๊ณ  ์žˆ๋‹ค [33-35]. ๋˜ํ•œ ๊ฐ•์†Œ์„ฑ ๊ฐ€๊ณต๋ฒ•์œผ๋กœ ์ œ์กฐ๋œ ์†Œ์žฌ์˜ ๊ฒฝ์šฐ ๊ฐ€๊ณต์—ฐํ™” ๊ณผ์ •์—์„œ ๊ณ  ๊ฒฝ๊ฐ ์ž…๊ณ„ (high angle boundary, HAB)์˜ ๋ถ„์œจ์ด ๊ธ‰๊ฒฉํžˆ ์ฆ๊ฐ€ํ•˜๋Š” ๊ฒฝํ–ฅ์„ ๋ณด์ด๋Š” ๊ฒƒ์œผ๋กœ ํ™•์ธ๋˜์—ˆ๋‹ค. ์ด์— ๋”ฐ๋ผ CSAM Cu์˜ ๊ฐ€๊ณต ์—ฐํ™” ๊ฑฐ๋™์„ ์ดํ•ดํ•˜๊ธฐ ์œ„ํ•˜์—ฌ ์••์ถ• ์‹œํŽธ์— ๋Œ€ํ•œ EBSD ๋ถ„์„์„ ์ˆ˜ํ–‰ํ•˜๊ณ  ๊ทธ ๊ฒฐ๊ณผ๋ฅผ ๊ทธ๋ฆผ 7์— ๋‚˜ํƒ€๋ƒˆ๋‹ค. ๋จผ์ € ๊ฒฐ์ • ๋ฐฉ์œ„ ๋งต ๊ด€์ฐฐ ๊ฒฐ๊ณผ(a), ๋ชจ๋“  ์˜์—ญ์—์„œ ์ดˆ ๋ฏธ์„ธ ๊ฒฐ์ •๋ฆฝ์ด ํ˜•์„ฑ๋œ ๊ฒƒ์„ ์•Œ ์ˆ˜ ์žˆ์—ˆ์œผ๋ฉฐ ํ‰๊ท  ๊ฒฐ์ •๋ฆฝ ํฌ๊ธฐ๋Š” ~0.45 ฮผm๋กœ ์ธก์ •๋˜์—ˆ๋‹ค. ์ด์™€ ํ•จ๊ป˜ ์ดˆ ๋ฏธ์„ธ ๊ฒฐ์ •๋ฆฝ ์˜์—ญ ์™ธ ์ƒ๋Œ€์ ์œผ๋กœ ์กฐ๋Œ€ํ•œ ๊ฒฐ์ •๋ฆฝ์— ์ดˆ์ ์„ ๋งž์ถฐ๋ณด๋ฉด ๊ฒฐ์ •๋ฆฝ ๋‚ด๋ถ€์— ์•„ ๊ฒฐ์ •๋ฆฝ์ด ๋‹ค๋Ÿ‰ ํ˜•์„ฑ๋˜์–ด ์žˆ๋Š” ๊ฒƒ์„ ์•Œ ์ˆ˜ ์žˆ๋‹ค. ์ƒ๊ธฐ ๊ฒฐ๊ณผ๋“ค์„ ๊ณ ๋ คํ•ด ๋ณผ ๋•Œ, CSAM Cu์˜ ๊ฐ€๊ณต ์—ฐํ™” ํ˜„์ƒ์€ ๋‹ค์Œ๊ณผ ๊ฐ™์€ ๋‹จ๊ณ„๋กœ ์„ค๋ช…๋  ์ˆ˜ ์žˆ๋‹ค: 1) ๋ณ€ํ˜•์ด ๊ฐ€ํ•ด์ง€๋Š” ์ค‘ ์•„๊ฒฐ์ •๋ฆฝ (subgrain)์˜ ์ƒ์„ฑ (๋™์  ํšŒ๋ณต), 2) ์•„๊ฒฐ์ •๋ฆฝ ํšŒ์ „ (sub-grain rotation)์— ์˜ํ•œ ๋ฏธ์„ธ ๊ฒฐ์ •๋ฆฝ ์ƒ์„ฑ (๋™์  ์žฌ๊ฒฐ์ •).

๋”ฐ๋ผ์„œ ์•„๊ฒฐ์ •๋ฆฝ ํšŒ์ „์ด ๋ฐœ์ƒํ•˜๋Š”์ง€ ์•Œ์•„๋ณด๊ณ ์ž ์žฌ๊ฒฐ์ •๋ถ„์œจ ๋งต์„ ๋ถ„์„ํ–ˆ์œผ๋ฉฐ ๊ทธ๋ฆผ 7(b)์— ๋„์‹œํ•˜์˜€๋‹ค. ๊ทธ๋ฆผ 7(b)์— ๋‚˜ํƒ€๋‚œ ๊ฒƒ๊ณผ ๊ฐ™์ด ๋Œ€๋ถ€๋ถ„์˜ ์˜์—ญ์€ substructured์™€ fully recrystallized area๋กœ ํ™•์ธ๋˜์—ˆ์œผ๋ฉฐ ๊ฐ๊ฐ 31%, 43%์˜ ๋ถ„์œจ์„ ๊ฐ€์ง€๋Š” ๊ฒƒ์œผ๋กœ ์ธก์ •๋˜์—ˆ๋‹ค. ์ด๋Š” ๋‹ค๋Ÿ‰์˜ ๋ณ€ํ˜• (ฮตt = 0.9)์ด ๊ฐ€ํ•ด์ง€๋Š” ๊ณผ์ •์—์„œ ๋ฏธ์„ธ์กฐ์ง์  ๋ณ€ํ™” (๋™์  ํšŒ๋ณต, ๋™์  ์žฌ๊ฒฐ์ •)๊ฐ€ ๋ฐœ์ƒํ•˜๋Š” ๊ฒƒ์„ ๋ช…ํ™•ํžˆ ์˜๋ฏธํ•œ๋‹ค. ์••์ถ•๋ณ€ํ˜• ์ค‘ ๋ฐœ์ƒํ•˜๋Š” ๋ฏธ์„ธ์กฐ์ง์  ๋ณ€ํ™”๋ฅผ ๋’ท๋ฐ›์นจํ•˜๊ธฐ ์œ„ํ•˜์—ฌ ์ธ์žฅ ๋ฐ ์••์ถ• ๋ณ€ํ˜• ํ›„ misorientation angle distribution์„ ๋ถ„์„ํ–ˆ์œผ๋ฉฐ ๊ทธ ๊ฒฐ๊ณผ๋ฅผ ๊ทธ๋ฆผ 8์— ๋„์‹œํ•˜์˜€๋‹ค. ์ธ์žฅ ๋ณ€ํ˜•๋œ ์†Œ์žฌ์˜ ๊ฒฝ์šฐ LABs์˜ ๋ถ„์œจ์ด ๋งค์šฐ ๋†’๊ณ , HABs์˜ ๋ถ„์œจ์€ ๋งค์šฐ ๋‚ฎ์€ ๊ฒƒ์œผ๋กœ ํ™•์ธ๋˜์—ˆ๋‹ค. ๋ฐ˜๋ฉด, ์••์ถ• ๋ณ€ํ˜•๋œ ์†Œ์žฌ์˜ ๊ฒฝ์šฐ ๋”์šฑ ์‹ฌํ•œ ๋ณ€ํ˜•์ด ๊ฐ€ํ•ด์กŒ์Œ์—๋„ ๋ถˆ๊ตฌํ•˜๊ณ  LABs๋ณด๋‹ค HABs์˜ ๋ถ„์œจ์ด ๋†’๊ฒŒ ์ธก์ •๋˜์—ˆ๋‹ค. ์ฆ‰, ๋‚ฎ์€ ๋ณ€ํ˜•๋Ÿ‰์„ ์ˆ˜์šฉํ•œ ์ธ์žฅ ์‹œํŽธ์˜ ๊ฒฝ์šฐ ์ „์œ„ ๋ฐ€๋„๊ฐ€ ์ฆ๊ฐ€ํ•˜๋ฉฐ ์ด์— ๋”ฐ๋ผ ์•ฝ๊ฐ„์˜ ๊ฐ€๊ณต ๊ฒฝํ™”๊ฐ€ ๋ฐœ์ƒํ•œ๋‹ค. ์ด์™€ ๋‹ฌ๋ฆฌ ์••์ถ• ๋ณ€ํ˜•์˜ ๊ฒฝ์šฐ peak stress ์ด ํ›„ ๋ฏธ์„ธ์กฐ์ง์  ๋ณ€ํ™” (๋™์  ํšŒ๋ณต ๋ฐ ๋™์  ์žฌ๊ฒฐ์ •)๊ฐ€ ๋ฐœ์ƒํ•จ์— ๋”ฐ๋ผ ๊ฐ€๊ณต ์—ฐํ™”๊ฐ€ ๋‚˜ํƒ€๋‚จ์„ ์•Œ ์ˆ˜ ์žˆ์—ˆ๋‹ค [33-35]. ํ•œํŽธ, ์••์ถ• ๋ณ€ํ˜•์˜ ์ดˆ๊ธฐ ๋‹จ๊ณ„์—์„œ ๊ฐ€๊ณต ๊ฒฝํ™”ํ˜„์ƒ์ด ์ผ๋ถ€ ๋‚˜ํƒ€๋‚˜๋Š” ์›์ธ์€ ๋ถˆ๊ท ์งˆํ•œ ๊ฒฐ์ •๋ฆฝ ๊ตฌ์กฐ ์ค‘ ์กฐ๋Œ€ ๊ฒฐ์ •๋ฆฝ ๋‚ด๋ถ€์—์„œ ์ „์œ„ ๋ฐ€๋„๊ฐ€ ์ฆ๊ฐ€ํ•จ์— ๋”ฐ๋ผ ๋ฐœ์ƒํ•œ ๊ฒฐ๊ณผ๋กœ ์‚ฌ๋ฃŒ๋œ๋‹ค.

3.4. ์ธ์žฅ ๋ฐ ์••์ถ• ๋ณ€ํ˜•์— ๋”ฐ๋ฅธ ํŒŒ๊ดด ๊ฑฐ๋™

์ƒ๊ธฐ ์†Œ์žฌ์˜ ์ธ์žฅ-์••์ถ•์— ๋Œ€ํ•œ ํŒŒ๊ดด ๋ชจ๋“œ๋ฅผ ํ™•์ธํ•˜๊ธฐ ์œ„ํ•ด ์••์ถ• ํ‘œ๋ฉด ๊ท ์—ด ๋ฐ ์ธ์žฅ ํŒŒ๋‹จ๋ฉด์„ ๊ด€์ฐฐํ•˜์˜€์œผ๋ฉฐ ์ด๋ฅผ ๊ทธ๋ฆผ 9์— ๋‚˜ํƒ€๋ƒˆ๋‹ค. ์—ฌ๊ธฐ์„œ (a)๋Š” ์••์ถ• ์‹œํŽธ์˜ ํ‘œ๋ฉด ๊ด€์ฐฐ๊ฒฐ๊ณผ์ด๋ฉฐ (b)๋Š” ์ธ์žฅ ํŒŒ๋‹จ๋ฉด์ด๋‹ค. ์••์ถ• ํ‘œ๋ฉด ๊ท ์—ด ๊ด€์ฐฐ ๊ฒฐ๊ณผ, ๋Œ€๋ถ€๋ถ„ ์••์ถ• ์‘๋ ฅ์ด ์ž‘์šฉํ•˜๋Š” ๋ฐฉํ–ฅ์œผ๋กœ ๊ท ์—ด์ด ์ƒ์„ฑ๋˜์—ˆ๊ณ  ์ด๋ฅผ ํ™•๋Œ€ํ•ด ๋ณธ ๊ฒฐ๊ณผ ์šฉ์‚ฌ ์ˆ˜์ง ๋ฐฉํ–ฅ์œผ๋กœ ์—ฐ์‹ ๋œ ๋ถ„๋ง์˜ ์ž…์ž ๊ณ„๋ฉด์„ ๋”ฐ๋ผ ๋œฏ๊ฒจ์ง„ ํ˜•ํƒœ์˜ ํŒŒ๊ดด๊ฐ€ ๋‚˜ํƒ€๋‚จ์„ ํ™•์ธํ•˜์˜€๋‹ค. ๊ทธ๋Ÿฌ๋‚˜ ์ด๋Ÿฌํ•œ ํŒŒ๊ดด ๊ฑฐ๋™์€ ์ด์ „ ์—ฐ๊ตฌ์—์„œ ์ˆ˜ํ–‰ํ•œ ์šฉ์‚ฌ ๋ฐฉํ–ฅ ์••์ถ• ์‹œํ—˜๊ณผ ๋น„๊ตํ•˜์—ฌ ํฐ ์ฐจ์ด๊ฐ€ ์žˆ๋Š” ํŒŒ๊ดด๊ฑฐ๋™์ด๋‹ค [17]. ์šฉ์‚ฌ ๋ฐฉํ–ฅ์— ๋Œ€ํ•œ ์••์ถ• ์‹œํ—˜์˜ ๊ฒฝ์šฐ ์ผ๋ฐ˜์ ์ธ ๋ฒŒํฌ ์†Œ์žฌ์™€ ์œ ์‚ฌํ•˜๊ฒŒ ํ•˜์ค‘์ด ์ž‘์šฉํ•˜๋Š” 45ยฐ ๋ฐฉํ–ฅ์œผ๋กœ ๊ท ์—ด์ด ์ƒ์„ฑ๋˜์—ˆ๋‹ค. ๋˜ํ•œ ๋Œ€๋ถ€๋ถ„ trans-particle ํ˜•ํƒœ์˜ ํŒŒ๊ดด๋ฅผ ๋ณด์ž„์œผ๋กœ์„œ ์ž…์ž ๊ณ„๋ฉด์ด ํŒŒ๊ดด์— ๋ฏผ๊ฐํ•˜๊ฒŒ ์ž‘์šฉํ•˜์ง€ ์•Š์•˜๋‹ค. ์ฆ‰, CSAM Cu์˜ ๊ฒฝ์šฐ ํ•˜์ค‘์ด ๊ฐ€ํ•ด์ง€๋Š” ๋ฐฉํ–ฅ์— ๋”ฐ๋ผ ํŒŒ๊ดด ๊ฑฐ๋™์€ ์ฐจ์ด๊ฐ€ ๋‚˜ํƒ€๋‚˜๋Š” ๊ฒƒ์„ ์•Œ ์ˆ˜ ์žˆ์—ˆ๋‹ค. ํ•œํŽธ ์ธ์žฅ ํŒŒ๋‹จ๋ฉด์˜ ๊ฒฝ์šฐ, ์ทจ์„ฑ ์†Œ์žฌ์™€๋Š” ๋‹ฌ๋ฆฌ ๊ตด๊ณก์ง„ ํ˜•ํƒœ์˜ ํŒŒ๊ดด๋ฉด์„ ํ™•์ธํ•ด ๋ณผ ์ˆ˜ ์žˆ์—ˆ์œผ๋ฉฐ, ์ผ๋ถ€ 2์ฐจ ๊ท ์—ด (secondary crack) ์—ญ์‹œ ๊ด€์ฐฐ๋˜์—ˆ๋‹ค. ์ฆ‰, ๋ณ€ํ˜•์„ ์ผ๋ถ€ ์ˆ˜์šฉ ๊ฐ€๋Šฅํ•œ ๊ฒƒ์€ ์—ฐ์„ฑ์˜ ํŒŒ๊ดด ํ˜•ํƒœ๋ฅผ ๋ณด์ด๊ธฐ ๋•Œ๋ฌธ์œผ๋กœ ์ƒ๊ฐ๋œ๋‹ค [36,37]. ๊ทธ๋Ÿฌ๋‚˜ ๊ณ  ๋ฐฐ์œจ์—์„œ ์ธ์žฅ ํŒŒ๋‹จ๋ฉด์„ ๊ด€์ฐฐํ•ด๋ณด๋ฉด, ์‹ฌํ•œ ์†Œ์„ฑ ๋ณ€ํ˜•์„ ๋ฐ›์€ ๋ถ„๋ง์ด ๊ทธ๋Œ€๋กœ ๋…ธ์ถœ๋˜์–ด์ ธ ๋‚˜ํƒ€๋‚˜๋Š” ๊ฒƒ์„ ํ†ตํ•ด ๊ธˆ์†ํ•™์  ๊ฒฐํ•ฉ (metallurgical bonding)์ด ์ œ๋Œ€๋กœ ์ด๋ฃจ์–ด์ง€์ง€ ์•Š์€ ์˜์—ญ์„ ๋”ฐ๋ผ ๊ท ์—ด์ด ์‹œ์ž‘๋˜๊ณ  ์ „ํŒŒ๋˜์–ด ๋‹ค์†Œ ๋‚ฎ์€ ๋ณ€ํ˜•๋Ÿ‰์„ ์ˆ˜์šฉํ•˜๋Š” ๊ฒƒ์„ ์•Œ ์ˆ˜ ์žˆ์—ˆ๋‹ค.

์ „์ˆ ํ•œ ๋ฐ”์™€ ๊ฐ™์ด ์ ์ธต๋œ ์ž…์ž์˜ ๊ณ„๋ฉด (particle boundary)์€ ํŒŒ๊ดด ๊ฑฐ๋™์— ์ฃผ์š”ํ•œ ์—ญํ• ์„ ํ•˜๋Š” ๊ฒƒ์œผ๋กœ ์‚ฌ๋ฃŒ๋œ๋‹ค. ๋”ฐ๋ผ์„œ ํŒŒ๊ดด ๊ฑฐ๋™์— ๋ฏธ์น˜๋Š” ์ž…์ž ๊ณ„๋ฉด์˜ ์˜ํ–ฅ์„ ์•Œ์•„๋ณด๊ธฐ ์œ„ํ•ด ์••์ถ•์‹œํŽธ์˜ ๋‹จ๋ฉด๊ณผ ์ธ์žฅ ํŒŒ๋‹จ๋ฉด์— ๋Œ€ํ•œ ๊ณ  ๋ฐฐ์œจ ๊ด€์ฐฐ์„ ์ˆ˜ํ–‰ํ•˜์˜€๊ณ  ์ด๋ฅผ ๊ทธ๋ฆผ 10์— ๋‚˜ํƒ€๋ƒˆ๋‹ค. ๋จผ์ € (a,b)๋Š” ์••์ถ• ์‹œํŽธ์˜ ๋‹จ๋ฉด ์‚ฌ์ง„์ด๋‹ค. ๋Œ€๋ถ€๋ถ„์˜ ๊ท ์—ด์€ (a)์™€ ๊ฐ™์ด ์ž…์ž ๊ณ„๋ฉด์„ ๋”ฐ๋ผ ์ƒ์„ฑ๋˜์—ˆ์œผ๋ฉฐ ๋งค์šฐ ๊ตญ๋ถ€์ ์ธ ์˜์—ญ์—์„œ (b)์™€ ๊ฐ™์€ trans-particle ํ˜•ํƒœ๋ฅผ ๋‚˜ํƒ€๋ƒˆ๋‹ค. ์ด๋ฅผ ํ†ตํ•ด ๋Œ€๋ถ€๋ถ„์˜ ๊ท ์—ด์ƒ์„ฑ์—๋Š” ์ž…์ž ๊ณ„๋ฉด์ด ๊ฒฐ์ •์ ์ธ ์—ญํ• ์„ ํ•˜๋Š” ๊ฒƒ์„ ์•Œ ์ˆ˜ ์žˆ์—ˆ์œผ๋ฉฐ, ์ผ๋ถ€ ์˜์—ญ์—์„œ ๊ด€์ฐฐ๋˜๋Š” trans-particle ํ˜•ํƒœ์˜ ํŒŒ๊ดด๋ฅผ ํ†ตํ•ด ๋ถ„๋ง ๊ฐ„์˜ ๊ฒฐํ•ฉ๋ ฅ์ด ์ƒ๋‹นํžˆ ์šฐ์ˆ˜ํ•œ ์˜์—ญ์ด ์กด์žฌํ•˜๋Š” ๊ฒƒ์„ ๊ฐ„์ ‘์ ์œผ๋กœ ์•Œ ์ˆ˜ ์žˆ์—ˆ๋‹ค. ์ธ์žฅ ํŒŒ๋‹จ๋ฉด ๊ณ  ๋ฐฐ์œจ ๊ด€์ฐฐ ๊ฒฐ๊ณผ (c), ์•ž์„  ๊ทธ๋ฆผ 9์—์„œ์™€ ๊ฐ™์ด ๋Œ€๋ถ€๋ถ„์ด ์‹ฌํ•œ ์†Œ์„ฑ ๋ณ€ํ˜•์„ ๋ฐ›๋Š” ์ž…์ž ๊ณ„๋ฉด์—์„œ ๋œฏ๊ฒจ์ง„ ๋“ฏํ•œ ํŒŒ๊ดด ๊ฑฐ๋™์„ ๋ณด์˜€๋‹ค. ๊ทธ๋Ÿฌ๋‚˜ ์ž…์ž ๊ณ„๋ฉด์— ์ดˆ์ ์„ ๋งž์ถฐ๋ณด๋ฉด (d), ์ˆ˜ ๋ฐฑ nm ํฌ๊ธฐ์˜ ๋”คํ”Œ๋“ค์ด ๋‹ค๋Ÿ‰ ๊ด€์ฐฐ๋˜์—ˆ๋‹ค. ์ด๋Š” ์•ž์„  ์••์ถ• ํŒŒ๋‹จ๋ฉด์—์„œ ๊ด€์ฐฐ๋œ trans-particle ํ˜•ํƒœ์˜ ํŒŒ๊ดด์™€ ์œ ์‚ฌํ•˜๊ฒŒ ๋ถ„๋ง ๊ฐ„์˜ ๊ฒฐํ•ฉ๋ ฅ์ด ๋งค์šฐ ์šฐ์ˆ˜ํ•œ ์˜์—ญ์ด ์กด์žฌํ•œ๋‹ค๋Š” ๊ฒƒ์„ ๋‚˜ํƒ€๋‚ด๋Š” ์ฆ๊ฑฐ๋กœ์จ ์ƒ๊ธฐ ์†Œ์žฌ์˜ ์‘๋ ฅ-๋ณ€ํ˜•๋ฅ  ๊ณก์„ ์ƒ์—์„œ ๋‚˜ํƒ€๋‚œ ์ผ๋ถ€ ์†Œ์„ฑ ๋ณ€ํ˜•์„ ๋’ท๋ฐ›์นจํ•˜๋Š” ๊ทผ๊ฑฐ๋กœ ํŒ๋‹จ๋œ๋‹ค.

3.5. ๋ณ€ํ˜• ๊ฒฝํ™” ๋ฐ ์—ฐํ™” ๊ตฌ์„ฑ ๋ฐฉ์ •์‹

๊ฐ•์†Œ์„ฑ ๊ฐ€๊ณต์œผ๋กœ ์ œ์กฐ๋œ FCC ๊ธˆ์†๋“ค์˜ ๊ฒฝ์šฐ ์ƒ์˜จ ๋ณ€ํ˜•์ค‘ ๊ฐ€๊ณต ์—ฐํ™” ํ˜„์ƒ์ด ๋ฐœ์ƒํ•˜๋Š” ๊ฒƒ์œผ๋กœ ๋ณด๊ณ ๋˜๊ณ  ์žˆ๋‹ค. Wei ๋“ฑ์€ ์ด๋Ÿฌํ•œ FCC ๊ธฐ๋ฐ˜ ๊ธˆ์†์˜ ๊ฐ€๊ณต ๊ฒฝํ™”์™€ ๊ฐ€๊ณต ์—ฐํ™”๋ฅผ ๊ณ ๋ คํ•œ ๊ฒฝํ—˜์ ์ธ ๊ตฌ์„ฑ ๋ฐฉ์ •์‹์„ ์ œ์‹œํ•˜์˜€์œผ๋ฉฐ ์•„๋ž˜์˜ Eq.(4)๋กœ ํ‘œํ˜„๋œ๋‹ค [38]:

(4)
ฯƒ   =   ฯƒ s   +   ( ฯƒ f   -   ฯƒ s ) exp ( - r ( ฮต ฮต p ) q )

์—ฌ๊ธฐ์„œ ฯƒs์€ ํฌํ™” ์‘๋ ฅ, ฯƒf๋Š” ์˜ˆ์ธก๋œ ์œ ๋™ ์‘๋ ฅ, ฯƒp๋Š” ๊ทน๋Œ€ ๋ณ€ํ˜•๋Ÿ‰ (peak strain), r ๋ฐ q๋Š” ์ƒ์ˆ˜ (์—ฌ๊ธฐ์„œ q๋Š” ๊ฐ€๊ณต ์—ฐํ™” ์†๋„, r์€ ๊ฐ€๊ณต ๊ฒฝํ™”์™€ ์—ฐํ™”๊ฐ€ ์ •์ƒ ์ƒํƒœ์˜ ๊ท ํ˜•์„ ์–ผ๋งŒํผ ๋น ๋ฅด๊ฒŒ ๋„๋‹ฌํ•˜๋Š” ์ง€์— ๋Œ€ํ•œ ๋ณ€์ˆ˜). ์ด๋Ÿฌํ•œ r ๋ฐ q ์€ Avrami ํ˜•ํƒœ์˜ Eq. (5)์„ ํ†ตํ•ด ์‹คํ—˜์ ์ธ ๋ฐ์ดํ„ฐ ํ”Œ๋กฏ์„ fitting ํ•จ์œผ๋กœ์จ ์–ป์„ ์ˆ˜ ์žˆ๋‹ค [39]:

(5)
X S   =   1 - exp ( - r ( ฮต ฮต p ) q )

์—ฌ๊ธฐ์„œ XS ์—ฐํ™” ๋ถ„์œจ์ด๋ฉฐ ์•„๋ž˜์˜ Eq. (6)์œผ๋กœ ์ •์˜ํ•  ์ˆ˜ ์žˆ๋‹ค:

(6)
X S   =   ฯƒ f   -   ฯƒ ฯƒ f   -   ฯƒ s

์ƒ๊ธฐ ๊ด€๊ณ„์‹์œผ๋กœ๋ถ€ํ„ฐ ์–ป์–ด์ง„ ์‹คํ—˜์  ๊ฐ’๋“ค์„ ํ‘œ 2์— ์ •๋ฆฌํ•˜์˜€๋‹ค. ์ด์™€ ํ•จ๊ป˜ ํ‘œ 2์— ์ •๋ฆฌ๋œ ์‹คํ—˜์  ๊ฐ’๋“ค์„ ์ด์šฉํ•˜์—ฌ He gas๋กœ ์ œ์กฐ๋œ CSAM Cu์˜ ์œ ๋™ ๊ณก์„ ์„ ์˜ˆ์ธกํ•˜๊ณ  ๊ทธ ๊ฒฐ๊ณผ๋ฅผ ๊ทธ๋ฆผ 11์— ๋„์‹œํ•˜์˜€๋‹ค. ๊ทธ๋ฆผ 11์„ ์‚ดํŽด๋ณด๋ฉด Eq.(4)๋กœ๋ถ€ํ„ฐ ๊ณ„์‚ฐ๋œ ๊ฐ’์ด ์‹คํ—˜์  ๋ฐ์ดํ„ฐ์™€ ์ž˜ ์ƒ์‘ํ•˜๋Š” ๊ฒƒ์œผ๋กœ ํ™•์ธ๋˜์–ด ๊ฐ€๊ณต ๊ฒฝํ™” ๋ฐ ์—ฐํ™”๋ฅผ ๊ณ ๋ คํ•œ ๊ตฌ์„ฑ ๋ฐฉ์ •์‹์„ ํ†ตํ•ด CSAM Cu์˜ ๋ณ€ํ˜• ๊ฑฐ๋™์„ ์˜ˆ์ธก ๊ฐ€๋Šฅํ•จ์„ ์•Œ ์ˆ˜ ์žˆ์—ˆ๋‹ค.

๊ฒฐ๋ก ์ ์œผ๋กœ CSAM Cu์˜ ๊ฒฝ์šฐ ๋งค์šฐ ๋›ฐ์–ด๋‚œ ๊ธฐ๊ณ„์  ํŠน์„ฑ์„ ๋ณด์ด๋ฉฐ ์ธ์žฅ-์••์ถ• ์‹œํ—˜์—์„œ ํ•ญ๋ณต ๊ฐ•๋„๋Š” ์„œ๋กœ ์œ ์‚ฌํ•œ ๊ฐ’์„ ๊ฐ€์ง€๋Š” ๊ฒƒ์œผ๋กœ ๋‚˜ํƒ€๋‚ฌ๋‹ค. ์ด๋ฅผ ํ†ตํ•ด near net shaping์ด ๊ฐ€๋Šฅํ•œ cold spray ๊ณต์ •์˜ ๊ตฌ์กฐ์šฉ ์†Œ์žฌ ์ œ์กฐ ๊ฐ€๋Šฅ์„ฑ์„ ํ™•์ธํ•  ์ˆ˜ ์žˆ์—ˆ๋‹ค. ๊ทธ๋Ÿฌ๋‚˜, ์—ฌ์ „ํžˆ ์ธ์žฅ์˜ ๊ฒฝ์šฐ ์ผ๋ถ€ ๋ณ€ํ˜•์„ ์ˆ˜์šฉํ•˜์ง€๋งŒ ์ž…์ž ๊ณ„๋ฉด (particle interface)์—์„œ์˜ ๊ฒฐํ•ฉ ๋ฌธ์ œ์ ์ด ๋ฐœ๊ฒฌ๋˜์—ˆ๋‹ค. ํ–ฅํ›„ ์—ด์ฒ˜๋ฆฌ ๋ฐ ๊ณต์ • ๋ณ€์ˆ˜ ์ œ์–ด ๋“ฑ์„ ํ†ตํ•ด ๊ฒฐํ•จ์„ ์ค„์ด๋ฉด laser-based AM ๊ธฐ์ˆ ๋“ค๊ณผ ๋น„๊ตํ•˜์—ฌ ๋‹ค๋ฅธ ์žฅ์ ์„ ๊ฐ€์งˆ ์ˆ˜ ์žˆ๋Š” CSAM์„ ํšจ๊ณผ์ ์œผ๋กœ ๊ตฌ์กฐ์šฉ ๋ถ€ํ’ˆ ์ œ์กฐ์— ์ ์šฉํ•  ์ˆ˜ ์žˆ์„ ๊ฒƒ์œผ๋กœ ๊ธฐ๋Œ€๋œ๋‹ค.

4. ๊ฒฐ ๋ก 

๋ณธ ์—ฐ๊ตฌ์—์„œ๋Š” CSAM ๊ธฐ์ˆ ์„ ์ด์šฉํ•˜์—ฌ ๋‘๊ป˜ ์•ฝ 4 mm์˜ ์ˆœ์ˆ˜ Cu ๋ฒŒํฌ ์†Œ์žฌ๋ฅผ ์ œ์กฐํ•˜์˜€๋‹ค. ์ œ์กฐ๋œ ์†Œ์žฌ์— ๋Œ€ํ•˜์—ฌ ์ธ์žฅ-์••์ถ• ์‹œํ—˜ ๋ฐ ๋ณ€ํ˜•/ํŒŒ๊ดด ๊ฑฐ๋™์„ ๋ถ„์„ํ•˜๊ณ  ๋‹ค์Œ๊ณผ ๊ฐ™์€ ๊ฒฐ๋ก ์„ ์–ป์—ˆ๋‹ค

(1) ์ดˆ๊ธฐ ๋ฏธ์„ธ์กฐ์ง ๊ด€์ฐฐ ๊ฒฐ๊ณผ, CSAM Cu๋Š” ๋ฏธ์„ธ ๊ฒฐ์ •๋ฆฝ๊ณผ ์กฐ๋Œ€ ๊ฒฐ์ •๋ฆฝ์ด ํ˜ผ์žฌ๋œ heterogeneous grain structure๋ฅผ ๋ณด์˜€์œผ๋ฉฐ ํ‰๊ท  ๊ฒฐ์ •๋ฆฝ ํฌ๊ธฐ๋Š” ์•ฝ 1.12 ฮผm๋กœ ์ธก์ •๋˜์—ˆ๋‹ค. ์ƒ ๋ถ„์„ ๊ฒฐ๊ณผ ์ดˆ๊ธฐ ๋ถ„๋ง์—์„œ์™€ ๋™์ผํ•˜๊ฒŒ ฮฑ-Cu ๋‹จ์ƒ๋งŒ์ด ๊ฒ€์ถœ๋˜์—ˆ๊ณ  ์ถ”๊ฐ€์ ์ธ ์ƒ์€ ํ™•์ธ๋˜์ง€ ์•Š์•˜๋‹ค.

(2) ์ธ์žฅ ๋ฐ ์••์ถ• ์‹œํ—˜ ๊ฒฐ๊ณผ, ๋‘ ์กฐ๊ฑด ๋ชจ๋‘ ์•ฝ ~415 MPa์˜ ๋งค์šฐ ๋†’์€ ํ•ญ๋ณต ๊ฐ•๋„๋ฅผ ๋ณด์—ฌ SPD ๊ณต์ •์œผ๋กœ ์ œ์กฐ๋œ ์†Œ์žฌ์™€ ๋น„๊ตํ•ด์„œ ์œ ์‚ฌํ•˜๊ฑฐ๋‚˜ ํ˜น์€ ๋›ฐ์–ด๋‚œ ํŠน์„ฑ์„ ๋‚˜ํƒ€๋‚ด๋Š” ๊ฒƒ์œผ๋กœ ํ™•์ธ๋˜์—ˆ๋‹ค. ์ด์™€ ํ•จ๊ป˜ ์ธ์žฅ์˜ ๊ฒฝ์šฐ ํ˜„์žฌ๊นŒ์ง€ ๋ณด๊ณ ๋œ ๊ฒฐ๊ณผ์™€๋Š” ๋‹ฌ๋ฆฌ ํ•ญ๋ณต ์‘๋ ฅ ์ดํ›„ ์ผ๋ถ€ ์†Œ์„ฑ ๋ณ€ํ˜•์„ ์ผ๋ถ€ ์ˆ˜์šฉํ•˜์˜€๋‹ค. ๋ฐ˜๋ฉด ์••์ถ•์—์„œ๋Š” ์ƒ์˜จ์—์„œ ์‰ฝ๊ฒŒ ๋ฐœ์ƒํ•˜์ง€ ์•Š๋Š” ๊ฐ€๊ณต ์—ฐํ™” ํ˜„์ƒ์ด ๊ด€์ฐฐ๋˜์—ˆ๋‹ค.

(3) ๋ณ€ํ˜• ํ›„ ๋ฏธ์„ธ์กฐ์ง ๊ด€์ฐฐ ๊ฒฐ๊ณผ, ์ธ์žฅ์˜ ๊ฒฝ์šฐ ์ผ๋ถ€ ์†Œ์„ฑ๋ณ€ํ˜•์„ ์ˆ˜์šฉํ•œ (์—ฐ์‹ ๋œ ๊ฒฐ์ •๋ฆฝ ๋ฐ LAB) ์กฐ์ง์ด ๊ด€์ฐฐ๋˜์—ˆ์œผ๋ฉฐ, ๋†’์€ LAB ๋ถ„์œจ์„ ๋ณด์˜€๋‹ค. ๋ฐ˜๋ฉด, ์••์ถ• ๋ณ€ํ˜•๋œ ์‹œํŽธ์—์„œ๋Š” ์•„๊ฒฐ์ •๋ฆฝ ์ƒ์„ฑ ๋ฐ ํšŒ์ „, HAB ๋ถ„์œจ์˜ ์ฆ๊ฐ€๋ฅผ ํ†ตํ•ด ๋™์  ํšŒ๋ณต ๋ฐ ์žฌ๊ฒฐ์ • ํ˜„์ƒ์ด ๋ฐœ์ƒํ•œ ๊ฒƒ์œผ๋กœ ํ™•์ธ๋˜์—ˆ๋‹ค. ์ฆ‰ ์••์ถ• ๋ณ€ํ˜• ์ค‘ ๋ฐœ์ƒํ•œ ๊ฐ€๊ณต ์—ฐํ™”๋Š” ๋™์  ํšŒ๋ณต ๋ฐ ์žฌ๊ฒฐ์ • ํ˜„์ƒ์— ๊ธฐ์ธํ•˜๋Š” ๊ฒƒ์œผ๋กœ ๋‚˜ํƒ€๋‚ฌ๋‹ค.

(4) ์ธ์žฅ ๋ฐ ์••์ถ• ์‹œํ—˜ ํ›„ ํ‘œ๋ฉด ๋ฐ ๋‹จ๋ฉด์„ ๊ด€์ฐฐํ•ด ๋ณธ ๊ฒฐ๊ณผ, ๊ฑฐ์‹œ์ ์œผ๋กœ ๋‘ ์กฐ๊ฑด ๋ชจ๋‘ ์ž…์ž ๊ณ„๋ฉด์„ ๋”ฐ๋ผ ๊ท ์—ด์ด ์ „ํŒŒํ•˜๋Š” ๊ฒฝํ–ฅ์„ ๋ณด์˜€๋‹ค. ์ด์™€ ํ•จ๊ป˜, ๋ณ€ํ˜•์„ ์ผ๋ถ€ ์ˆ˜์šฉํ–ˆ๋˜ ์ธ์žฅ ์‹œํŽธ์˜ ๊ฒฝ์šฐ ์—ฐ์„ฑ ํŒŒ๊ดด์—์„œ ์ฃผ๋กœ ๊ด€์ฐฐ๋˜๋Š” ๋”คํ”Œ (์ˆ˜์‹ญ ~ ์ˆ˜ ๋ฐฑ nm)์ด ํ˜•์„ฑ๋˜์–ด ์†Œ์„ฑ ๋ณ€ํ˜•์ด ๋ฐœ์ƒํ•œ ๊ฒƒ์„ ์ง์ ‘์ ์œผ๋กœ ํ™•์ธํ•ด ๋ณผ ์ˆ˜ ์žˆ์—ˆ๋‹ค. ๋˜ํ•œ ๊ฐ€๊ณต ๊ฒฝํ™” ๋ฐ ์—ฐํ™”๋ฅผ ๊ณ ๋ คํ•œ ๊ตฌ์„ฑ ๋ฐฉ์ •์‹์„ ์ด์šฉํ•˜์—ฌ CSAM Cu ์†Œ์žฌ์˜ ์••์ถ•๋ณ€ํ˜• ๊ฑฐ๋™์„ ์˜ˆ์ธกํ•ด๋ณผ ์ˆ˜ ์žˆ์—ˆ๋‹ค.

Acknowledgements

This study was supported by Korea Institute for Advancement of Technology (KIAT) grant funded by the Korea Government (MOTIE) (P0002007, The Competency Development Program for Industry Specialist).

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Figures and Tables

Fig. 1.

Characteristics of pure copper powder used in this study; (a) morphology, (b) EBSD grain orientation map.

../../Resources/kim/KJMM.2020.58/kjmm-2020-58-11-759f1.jpg
Fig. 2.

Macro image of cold sprayed copper bulk material.

../../Resources/kim/KJMM.2020.58/kjmm-2020-58-11-759f2.jpg
Fig. 3.

X-ray diffraction patterns analysis results; (a) X-ray spectra of Cu before and after cold spray and (b) modified Williamson-Hall plot.

../../Resources/kim/KJMM.2020.58/kjmm-2020-58-11-759f3.jpg
Fig. 4.

EBSD analysis results of cold sprayed Cu; (a) grain orientation map, (b) recrystallized fraction map.

../../Resources/kim/KJMM.2020.58/kjmm-2020-58-11-759f4.jpg
Fig. 5.

Tensile and compressive stress-strain curves for cold sprayed copper material.

../../Resources/kim/KJMM.2020.58/kjmm-2020-58-11-759f5.jpg
Fig. 6.

EBSD grain orientation map of tensile deformed specimen.

../../Resources/kim/KJMM.2020.58/kjmm-2020-58-11-759f6.jpg
Fig. 7.

Deformed microstructures at ฮตt = 0.9; (a) grain orientation map and (b) recrystallized fraction map.

../../Resources/kim/KJMM.2020.58/kjmm-2020-58-11-759f7.jpg
Fig. 8.

Quantitative analysis of misorientation angle distribution; after (a) compressive test and (b) tensile test.

../../Resources/kim/KJMM.2020.58/kjmm-2020-58-11-759f8.jpg
Fig. 9.

(a) Compressive and (b) tensile fractured surface SEM images.

../../Resources/kim/KJMM.2020.58/kjmm-2020-58-11-759f9.jpg
Fig. 10.

(a, b) Cross sectional images of compressive surface crack and (c, d) high magnification tensile fractured surface images.

../../Resources/kim/KJMM.2020.58/kjmm-2020-58-11-759f10.jpg
Fig. 11.

Flow curve produced by the estimated by Eq. (4) and the experimental data.

../../Resources/kim/KJMM.2020.58/kjmm-2020-58-11-759f11.jpg
Table 1.

Cold spray process parameters used in this study.

Spray distance Powder feed rate Nozzle pressure Gas temperature Powder temperature Gun speed
CSAM Cu 30 mm 5 rpm 26 bar 710 K 573 K 100 mm/s
Table 2.

Numerical values of the constant in Eq. (4) estimated by experimental data.

ฯƒs ฮตc ฮตp r q
CSAM Cu 364 MPa 0.01 0.09 0.004 2.961