The Journal of
the Korean Journal of Metals and Materials

The Journal of
the Korean Journal of Metals and Materials

Monthly
  • pISSN : 1738-8228
  • eISSN : 2288-8241

Editorial Office


  1. ๋ถ€๊ฒฝ๋Œ€ํ•™๊ต ์‹ ์†Œ์žฌ์‹œ์Šคํ…œ๊ณตํ•™๊ณผ (Department of Materials System Engineering, Pukyong National University, Busan 48513, Republic of Korea)



directional solidification, 247LC superalloy, laser surface melting, epitaxial growth, solidification cracking

1. ์„œ ๋ก 

์ผ๋ฐฉํ–ฅ์‘๊ณ  ๋ฐ ๋‹จ๊ฒฐ์ • ๋‹ˆ์ผˆ ์ดˆ๋‚ด์—ดํ•ฉ๊ธˆ์€ ์šฐ์ˆ˜ํ•œ ๊ณ ์˜จ ๊ธฐ๊ณ„์  ์„ฑ์งˆ์ด ์š”๊ตฌ๋˜๋Š” ๋ฐœ์ „ํ„ฐ๋นˆ ๋ฐ ํ•ญ๊ณต๊ธฐ์—”์ง„์˜ ํ•ต์‹ฌ ๊ณ ์˜จ๋ถ€ํ’ˆ(๋ธ”๋ ˆ์ด๋“œ, ๋ฒ ์ธ ๋“ฑ)์— ์ ์šฉ๋˜๊ณ  ์žˆ์œผ๋ฉฐ, ํ•ด๋‹น ๋ถ€ํ’ˆ์˜ ์ œ์กฐ ๋ฐ ์œ ์ง€๋ณด์ˆ˜ ์‹œ์—๋Š” ๋‹ค์–‘ํ•œ ๋ชฉ์ ์œผ๋กœ ์šฉ์ ‘ ๋ฐ ์ ์ธต์ œ์กฐ ๊ณต์ •์ด ์‚ฌ์šฉ๋  ์ˆ˜ ์žˆ๋‹ค. ํ•˜์ง€๋งŒ ํ•ด๋‹น ์ดˆ๋‚ด์—ดํ•ฉ๊ธˆ ๋Œ€๋ถ€๋ถ„์ด 5mass% ์ด์ƒ์˜ Al + Ti ํ•จ๋Ÿ‰์„ ๊ฐ€์ง„ ๋‚œ์šฉ์ ‘์„ฑ(difficult-to-weld) ์†Œ์žฌ์ด๋ฉฐ, ํŠนํžˆ ๋นˆ๋ฒˆํ•œ ์šฉ์ ‘ ๊ณ ์˜จ๊ท ์—ด ๋ฐœ์ƒ์ด ๋ฌธ์ œ ์‹œ ๋˜๋Š” ๊ฒƒ์œผ๋กœ ์ž˜ ์•Œ๋ ค์ ธ ์žˆ๋‹ค[1]. ํ•ด๋‹น ์†Œ์žฌ๋“ค์˜ ๊ฑด์ „ํ•œ ์šฉ์ ‘ ๋ฐ ์ ์ธต์ œ์กฐ๋ถ€๋ฅผ ์–ป๊ธฐ ์œ„ํ•ด์„œ๋Š” ๊ฐ ๊ณ ์˜จ ๊ท ์—ด ๊ฑฐ๋™์˜ ๋ฉด๋ฐ€ํ•œ ๊ฒ€ํ† ์™€ ์•ผ๊ธˆํ•™์  ์–ต์ œ๋ฐฉ์•ˆ ๋„์ถœ์ด ์ „์ œ๋˜์–ด์•ผ ํ•œ๋‹ค. ํŠนํžˆ, ์ผ๋ฐฉํ–ฅ์‘๊ณ  ๋ฐ ๋‹จ๊ฒฐ์ • ์ดˆ๋‚ด์—ดํ•ฉ๊ธˆ์˜ ๊ฒฝ์šฐ, ์šฉ์ ‘๋ถ€์™€ ์ ์ธต์ œ์กฐ๋ถ€์—์„œ๋„ ๋ชจ์žฌ์˜ ๊ฒฐ์ •๋ฐฉ์œ„ ํŠน์„ฑ์„ ์œ ์ง€์‹œํ‚ฌ ์ˆ˜ ์žˆ๋Š” ์—ํ”ผํƒ์…œ(epitaxial) ์„ฑ์žฅ๊ธฐ์ˆ ์ด ์š”๊ตฌ๋˜๋Š” ๊ฒฝ์šฐ๊ฐ€ ๋งŽ์•„, ๊ณ ์˜จ๊ท ์—ด(ํŠนํžˆ ์‘๊ณ ๊ท ์—ด)๊ณผ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ๊ฑฐ๋™์„ ๋™์‹œ์— ๊ณ ๋ คํ•œ ์ตœ์  ๊ณต์ • ์„ค๊ณ„๋Š” ํ•„์ˆ˜์ ์ด๋ผ ํ•  ์ˆ˜ ์žˆ๋‹ค. ์ด๋Ÿฌํ•œ ๊ด€์ ์—์„œ Nishimoto et al.์€ CMSX-4 ํ•ฉ๊ธˆ ๊ฐ€์Šคํ„ฐ๋นˆ ๋ธ”๋ ˆ์ด๋“œ์˜ ์žฌ์ƒ๋ถ€ํ’ˆ ์ œ์กฐ๋ฅผ ๋ชฉ์ ์œผ๋กœ Renรฉ 142 ์šฉ๊ฐ€์žฌ๋ฅผ ์ด์šฉํ•œ ๋ ˆ์ด์ € ํด๋ž˜๋”ฉ์„ ๊ณ ์•ˆํ•˜์˜€์œผ๋ฉฐ, ์ฃผ์ƒ-๋“ฑ์ถ• ์ฒœ์ด(Columnar to Equiaxed Transition) ์ด๋ก ์„ ๊ธฐ๋ฐ˜์œผ๋กœ ๋‹ค์ธต ํด๋ž˜๋“œ๋ถ€์˜ ๋‹จ๊ฒฐ์ • ์„ฑ์žฅ ๊ธฐ์ˆ ์— ๋Œ€ํ•ด ๋ณด๊ณ ํ•œ ๋ฐ” ์žˆ๋‹ค[2]. Zhou et al.์€ Re ์ €๊ฐํ˜• ๋‹ˆ์ผˆ ์ดˆ๋‚ด์—ดํ•ฉ๊ธˆ์˜ DED(Direct Energy Deposition) ์ ์ธต์ œ์กฐ ๊ฑด์ „์„ฑ์„ ๊ฒ€ํ† ํ•˜์˜€์œผ๋ฉฐ, ํŠนํžˆ ๋‹จ๊ฒฐ์ • ์„ฑ์žฅ ์‹œ ๋ ˆ์ด์ €๋น”์˜ ์Šค์บ”์กฐ๊ฑด(์—๋„ˆ์ง€ ๋ฐ€๋„, ๋ ˆ์ด์ €๋น” ์ด์†ก์†๋„ ๋“ฑ)์— ๋”ฐ๋ฅธ ์‘๊ณ ์กฐ์ง์˜ ๋ณ€ํ™” ๋ฐ ๊ณ ์˜จ๊ท ์—ด ๋ฐœ์ƒ๊ณผ์˜ ์ƒ๊ด€๊ด€๊ณ„์— ๋Œ€ํ•ด์„œ ๋ณด๊ณ ํ•œ ๋ฐ” ์žˆ๋‹ค[3]. ๊ทธ๋ฆฌ๊ณ  Lu et al. ๋˜ํ•œ CMSX-10 ํ•ฉ๊ธˆ์˜ DED ์ ์ธต ์ œ์กฐ ์‹œ ๋‹จ๊ฒฐ์ • ์„ฑ์žฅ ํŠน์„ฑ์— ๋Œ€ํ•ด ๊ฒ€ํ† ํ•œ ๋ฐ” ์žˆ์œผ๋ฉฐ, ํŠนํžˆ ์‘๊ณ ๊ฒฐ์ •๋ฆฝ ๊ฐ„์˜ ๋ฐฉ์œ„์ฐจ์— ๋”ฐ๋ฅธ ๊ณ ์˜จ๊ท ์—ด ๋ฐœ์ƒ๊ฑฐ๋™์„ ์‹ฌ๋„์žˆ๊ฒŒ ๊ณ ์ฐฐํ•˜์˜€์œผ๋ฉฐ, 7ยฐ ์ด์ƒ์˜ ๋ฐฉ์œ„์ฐจ๋ฅผ ๊ฐ€์ง„ ๊ฒฐ์ •๋ฆฝ๊ณ„์— ์šฐ์„ ์ ์œผ๋กœ ๊ณ ์˜จ๊ท ์—ด์ด ๋ฐœ์ƒํ•  ์ˆ˜ ์žˆ์Œ์„ ์ œ์‹œํ•œ ๋ฐ” ์žˆ๋‹ค[4]. ์ด์™€ ์œ ์‚ฌํ•œ ๊ฒฐ๊ณผ๋Š” Chen et al. ์— ์˜ํ•ด์„œ๋„ ๋ณด๊ณ ๋˜๊ณ  ์žˆ๋‹ค[5]. ์ด์ฒ˜๋Ÿผ ์‘๊ณ ๊ท ์—ด๊ณผ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ์— ๋Œ€ํ•œ ์„ ํ–‰ ์—ฐ๊ตฌ๋“ค์€ ๋Œ€๋ถ€๋ถ„์ด ๋‹จ๊ฒฐ์ • ์ดˆ๋‚ด์—ดํ•ฉ๊ธˆ์— ์ดˆ์ ์„ ๋งž์ถ”๊ณ  ์žˆ์œผ๋ฉฐ[6], ์ผ๋ฐฉํ–ฅ์‘๊ณ  ์ดˆ๋‚ด์—ดํ•ฉ๊ธˆ์— ๋Œ€ํ•œ ์„ ํ–‰์—ฐ๊ตฌ ๊ฒฐ๊ณผ๋Š” ๋น„๊ต์  ๋ถ€์กฑํ•œ ์‹ค์ •์ด๋‹ค[7-9]. ๋ณธ ์ €์ž์ง„์€ ์ผ๋ฐฉํ–ฅ์‘ ๊ณ ์šฉ 247LC ์ดˆ๋‚ด์—ดํ•ฉ๊ธˆ ์šฉ์ ‘๋ถ€์—์„œ ๋ฌธ์ œ ์‹œ ๋˜๋Š” ์‘๊ณ [10,11] ๋ฐ ์•กํ™”๊ท ์—ด[12-16]์— ๋Œ€ํ•ด ๊ท ์—ด ๋ฏผ๊ฐ๋„์™€ ์ €๊ฐ๋ฐฉ์•ˆ์„ ๊ธฐ์ดˆ์ ์œผ๋กœ ๋ณด๊ณ ํ•œ ๋ฐ” ์žˆ์œผ๋‚˜, ์ด ๋˜ํ•œ 247LC ํ•ฉ๊ธˆ์˜ ๋‹ค๊ฒฐ์ • ์ฃผ์กฐ์žฌ๋ฅผ ๋Œ€์ƒ์œผ๋กœ ํ•œ ๊ฒ€ํ†  ๊ฒฐ๊ณผ๋“ค๋กœ, ์ผ๋ฐฉํ–ฅ์‘ ๊ณ ์†Œ์žฌ์— ์ ์šฉํ•˜๊ธฐ ์œ„ํ•ด์„œ๋Š” ๊ฐ ๊ณ ์˜จ๊ท ์—ด ๊ฑฐ๋™๊ณผ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ์˜ ์ƒ๊ด€๊ด€๊ณ„ ๋ฐ ๋ฌด๊ท ์—ด ์šฉ์ ‘ ๊ณต์ • ์กฐ๊ฑด์˜ ๋„์ถœ์ด ์ถ”๊ฐ€์ ์œผ๋กœ ํ•„์š”ํ•œ ์‹ค์ •์ด๋‹ค.

ํ•œํŽธ, ์‘๊ณ  ๊ณผ์ •์—์„œ ์™„์ „ํ•œ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ์„ ์–ป๊ธฐ ์œ„ํ•ด์„œ๋Š” ๋ฌด์ž‘์œ„์˜ ๊ฒฐ์ •๋ฐฉ์œ„๋ฅผ ๊ฐ€์ง„ ๋“ฑ์ถ• ๋ด๋“œ๋ผ์ดํŠธ, ์ฆ‰ ์ŠคํŠธ๋ ˆ์ด ๊ฒฐ์ •(stray crystal) ์„ฑ์žฅ์˜ ์–ต์ œ๊ฐ€ ํ•„์š”ํ•˜๋ฉฐ, ์ด๋ฅผ ์œ„ํ•ด์„œ๋Š” ์ €์ž…์—ด ์šฉ์œต ๊ณต์ •์˜ ์ ์šฉ์ด ํ•„์š”ํ•œ ๊ฒƒ์œผ๋กœ ์•Œ๋ ค์ ธ ์žˆ๋‹ค[2]. ์ด๋Ÿฌํ•œ ๊ด€์ ์—์„œ ์ „์ˆ ํ•œ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ์— ๋Œ€ํ•œ ์„ ํ–‰ ๊ฒฐ๊ณผ๋“ค์„ ํฌํ•จํ•œ ๋‹ค์–‘ํ•œ ์—ฐ๊ตฌ๋“ค์ด ๋ ˆ์ด์ €๋ฅผ ๋น„๋กฏํ•œ ์ €์ž…์—ด ๊ณต์ •์„ ์ ์šฉํ•˜๊ณ  ์žˆ๋‹ค[6]. ์ตœ๊ทผ์˜ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ๊ณผ ๊ด€๋ จ๋œ ์šฉ์œต๊ณต์ •์˜ ์ž…์—ด๋Ÿ‰์€ ๋Œ€๋žต 20โ€“50 J/mm ๋ฒ”์œ„๋ฅผ ์‚ฌ์šฉํ•˜๊ณ  ์žˆ์œผ๋‚˜[6], ์—ํ”ผํƒ์…œ ์„ฑ์žฅ๊ณผ ์‘๊ณ ๊ท ์—ด ์–ต์ œ์— ๋Œ€ํ•œ ๋ณด๋‹ค ์‹ฌ๋„์žˆ๋Š” ๊ฒ€ํ† ๋ฅผ ์œ„ํ•ด์„œ๋Š” ์ถ”๊ฐ€์ ์ธ ์ž…์—ด๋Ÿ‰ ์ €๊ฐ์ด ํ•„์š”ํ•œ ์‹ค์ •์ด๋‹ค. ํ•˜์ง€๋งŒ ๊ธฐ์กด ์„ ํ–‰ ์—ฐ๊ตฌ๋“ค์—์„œ ์‚ฌ์šฉ๋œ ๋ ˆ์ด์ € ๋น”์ „ํŒŒ๊ณ„์ˆ˜(beam propagation factor, M2)๋Š” 5 ์ด์ƒ์œผ๋กœ, ์ด๋Š” ์ถ”๊ฐ€์ ์ธ ์ž…์—ด๋Ÿ‰ ์ €๊ฐ ์‹œ ๋ถˆ์ถฉ๋ถ„ํ•œ ์—๋„ˆ์ง€ ๋ฐ€๋„๋กœ ์ธํ•œ ์œ ํšจ ์šฉ์œต๋ถ€ ํ™•๋ณด์— ํ•œ๊ณ„์ ์ด ์กด์žฌํ•  ์ˆ˜๋ฐ–์— ์—†๋‹ค.

๋”ฐ๋ผ์„œ ๋ณธ ์—ฐ๊ตฌ์—์„œ๋Š”, 247LC ์ผ๋ฐฉํ–ฅ์‘๊ณ  ์ดˆ๋‚ด์—ดํ•ฉ๊ธˆ ๊ฐ€์Šคํ„ฐ๋นˆ ๋ธ”๋ ˆ์ด๋“œ ์ œ์กฐ์‹œ์˜ ๊ฑด์ „ํ•œ ์šฉ์ ‘๋ถ€ ํ™•๋ณด๋ฅผ ๋ชฉ์ ์œผ๋กœ, ๊ธ‰์† ๋ ˆ์ด์ € ํ‘œ๋ฉด์šฉ์œต ์ ์šฉ์„ฑ์„ ๊ฒ€ํ† ํ•˜๊ณ ์ž ํ•œ๋‹ค. ํŠนํžˆ ์„ ํ–‰์—ฐ๊ตฌ์—์„œ ๊ณ ๋ ค๋˜์ง€ ์•Š์•˜๋˜ ๊ณ ์—๋„ˆ์ง€๋ฐ€๋„ ๋ ˆ์ด์ € ๋ฐ ์ดˆ์ €์ž…์—ด ๊ธ‰์†์šฉ์œต๋ฅผ ์ ์šฉํ•˜์—ฌ, 247LC ํ•ฉ๊ธˆ ์ผ๋ฐฉํ–ฅ์‘๊ณ  ๋ฏธ ์„ธ์กฐ์ง ํŠน์„ฑ๊ณผ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ๊ฑฐ๋™, ๊ทธ๋ฆฌ๊ณ  ์‘๊ณ ๊ท ์—ด ๋ฐœ์ƒ์˜ ์ƒ๊ด€๊ด€๊ณ„๋ฅผ ๊ทœ๋ช…ํ•˜์˜€์œผ๋ฉฐ, ์ตœ์ข…์ ์œผ๋กœ ์ผ๋ฐฉํ–ฅ์‘๊ณ  247LC ์ดˆ๋‚ด์—ดํ•ฉ๊ธˆ ๋ธ”๋ ˆ์ด๋“œ์˜ ๋ฌด๊ท ์—ด ์šฉ์ ‘๋ถ€ ํ™•๋ณด ๋ฐฉ์•ˆ์„ ์ œ์‹œํ•˜๊ณ ์ž ํ•œ๋‹ค.

2. ์‹คํ—˜ ๋ฐฉ๋ฒ•

2.1. 247LC ์ดˆ๋‚ด์—ดํ•ฉ๊ธˆ

๋‹ค๊ฒฐ์ •์ฃผ์กฐ ๋ฐ ์ผ๋ฐฉํ–ฅ์‘๊ณ  ์ฃผ์กฐ๋œ ์ƒ์šฉ 247LC ์ดˆ๋‚ด์—ดํ•ฉ๊ธˆ์„ ์‚ฌ์šฉํ•˜์˜€์œผ๋ฉฐ, ํ™”ํ•™์„ฑ๋ถ„์€ ํ‘œ 1์— ๊ธฐ์žฌํ•˜์˜€๋‹ค. ๋ณธ ๋…ผ๋ฌธ์—์„œ๋Š” ๊ฐ๊ฐ์„ 247LC-CC ๋ฐ 247LC-DS๋กœ ๋ช…๋ช…ํ•œ๋‹ค. ์ฃผ์กฐ์žฌ๋Š” ์šฉ์ฒดํ™” (1505 K โ€“ 120๋ถ„) ๋ฐ ์‹œํšจ ์—ด์ฒ˜๋ฆฌ(1145 K โ€“ 1200๋ถ„)๋ฅผ ์ ์šฉํ•˜์˜€๋‹ค. ์—ด์ฒ˜๋ฆฌ๋œ ์†Œ์žฌ๋Š” 150 ร— 50 ร— 3 mm์œผ๋กœ ๊ฐ€๊ณตํ•˜์—ฌ ์ตœ์ข… ์‹œํ—˜ํŽธ์„ ์ œ์ž‘ํ•˜์˜€๋‹ค.

2.2. ๋ ˆ์ด์ € ํ‘œ๋ฉด์šฉ์œต

์‹ฑ๊ธ€๋ชจ๋“œ ํŒŒ์ด๋ฒ„ ๋ ˆ์ด์ €(YLS-2000-SM, IPG)๋ฅผ ์ด์šฉํ•ด ํ‘œ๋ฉด์šฉ์œต์ฒ˜๋ฆฌ๋ฅผ ์‹ค์‹œํ•˜์˜€๋‹ค. ๊ทธ๋ฆผ 1์€ ์ด๋ฅผ ์œ„ํ•œ ๋ ˆ์ด์ € ์žฅ์น˜ ๋ฐ ์‹คํ—˜๊ณผ์ •์„ ๋‚˜ํƒ€๋‚ธ๋‹ค. ๋ณธ ๋ ˆ์ด์ € ๋ฐœ์ง„๊ธฐ๋Š” ์ตœ๋Œ€์ถœ๋ ฅ 2 kW, ํŒŒ์žฅ 1070 nm, ๊ทธ๋ฆฌ๊ณ  1.05์˜ M2 ๊ฐ’์„ ๊ฐ€์ง€๋ฉฐ, ์›๊ฒฉ ์Šค์บ๋„ˆ(intelliSCAN20, Scanlab)์™€ ์—ฐ๋™ํ•˜์—ฌ ์ •์ดˆ์  ์กฐ๊ฑด์—์„œ 38 ฮผm์˜ ๋น” ์ง๊ฒฝ์„ ๊ฐ€์ง€๋„๋ก ์„ค์ •ํ•˜์˜€๋‹ค. ํ‘œ 2๋Š” ๋Œ€ํ‘œ์ ์ธ ๋ ˆ์ด์ € ์šฉ์œต ์กฐ๊ฑด์„ ๋‚˜ํƒ€๋‚ธ๋‹ค.

ํ‘œ๋ฉด ์šฉ์œต์—๋Š” ์ง์„ (linear) ๋ฐ ์›ํ˜•์›Œ๋ธ”(wobble)์˜ ๋น”์Šค์บ”๋ฐฉ์‹์„ ์ ์šฉํ•˜์˜€๊ณ , ๋ ˆ์ด์ € ์ถœ๋ ฅ์€ 2 kW๋กœ ๊ณ ์ •ํ•˜์˜€๋‹ค. ํŠนํžˆ ์ง์„  ์Šค์บ” ์‹œ์—๋Š” ๋ ˆ์ด์ €๋น” ์Šค์บ”์†๋„ 50โ€“1000 mm/s ๋ฐ ์ž…์—ด๋Ÿ‰ 2โ€“40 J/mm์—์„œ ๋น„์ดˆ์ ๊ฑฐ๋ฆฌ๋ฅผ 0, +5, +10 mm์œผ๋กœ ๋‹ค๋ณ€ํ™”์‹œ์ผœ, 65โ€“1341 J/mm2 ๋ฒ”์œ„์˜ ์—๋„ˆ์ง€ ๋ฐ€๋„๋ฅผ ์ ์šฉ ๋ฐ ๊ฒ€ํ† ํ•˜์˜€๋‹ค. ์›ํ˜•์›Œ๋ธ” ์‹œ์—๋Š” ๋น”์Šค์บ”์†๋„ 1000 mm/s, ์ž…์—ด๋Ÿ‰ 2 J/mm, ๋น„์ดˆ์ ๊ฑฐ๋ฆฌ +10 mm ์กฐ๊ฑดํ•˜์—์„œ ์ง„ํญ 0.1 mm, ์ง„๋™์ˆ˜ 15000 Hz๋ฅผ ์ ์šฉํ•˜์˜€๋‹ค.

2.3. ๋ฏธ์„ธ์กฐ์ง ๋ถ„์„ ๋ฐ ๊ฒฝ๋„ ํ‰๊ฐ€

๋ ˆ์ด์ € ํ‘œ๋ฉด์šฉ์œต๋ถ€์— ๋Œ€ํ•ด ์„ฑ๋ถ„๋ถ„ํฌ ๋ฐ ์ƒ๋ถ„์„์„ ์‹ค์‹œํ•˜์˜€๋‹ค. ์„ฑ๋ถ„๋ถ„ํฌ ๋ถ„์„์—๋Š” ์ „์žํƒ์นจ๋ฏธ์„ธ๋ถ„์„๊ธฐ(Electron Probe Micro Analyzer, EPMA; JXAโ€“8530F, JEOL)๋ฅผ ์‚ฌ์šฉํ•˜์˜€๋‹ค. ๋ฏธ์„ธ ์ƒ๋ถ„์„์—๋Š” ํ›„๋ฐฉ์‚ฐ๋ž€์ „์žํšŒ์ ˆ(Electron Backscatter Diffraction, EBSD; Velocity Super, EDAX) ๋ฐ ํˆฌ๊ณผ์ „์žํ˜„๋ฏธ๊ฒฝ(Transmission Electron Microscopy, TEM; Talos F200X, Thermo Fisher Scientific)์„ ์‚ฌ์šฉํ•˜์˜€์œผ๋ฉฐ, TEM ๋ถ„์„ ์‹œ์—๋Š” ์—๋„ˆ์ง€๋ถ„์‚ฐํ˜•๋ถ„๊ด‘๋ถ„์„๊ธฐ(Energy Dispersive Spectroscopy, EDS)๋ฅผ ์ด์šฉํ•œ ์ƒ์˜ ์„ฑ๋ถ„๋ถ„์„๋„ ๋™์‹œ์— ์ˆ˜ํ–‰ํ•˜์˜€๋‹ค. TEM ๋ถ„์„์„ ์œ„ํ•œ ์ƒ˜ํ”Œ์€ ์ง‘์†์ด์˜จ๋น”์žฅ์น˜(Focused Ion Beam, FIB; Scios2, Thermo Fisher Scientific)๋ฅผ ์ด์šฉํ•ด ์ฑ„์ทจํ•˜์˜€๋‹ค. ๋ ˆ์ด์ € ์šฉ์œต๋ถ€์˜ ๊ธฐ๊ณ„์  ์„ฑ์งˆ ํ‰๊ฐ€๋ฅผ ์œ„ํ•ด ๋น„์ปค์Šค ๊ฒฝ๋„(HV100, Mitutoyo)๋ฅผ ํ‰๊ฐ€ํ•˜์˜€๋‹ค. ์‹œํ—˜์€ ํ•˜์ค‘ 1 kgf, ํ•˜์ค‘ ์œ ์ง€์‹œ๊ฐ„ 5 ์ดˆ์˜ ์กฐ๊ฑด์—์„œ ์‹ค์‹œํ•˜์˜€๋‹ค.

3. ๊ฒฐ๊ณผ๋ฐ๊ณ ์ฐฐ

3.1. ๋‹ค๊ฒฐ์ • ์šฉ์œต๋ถ€์˜ ๋ฏธ์„ธ์กฐ์ง ๋ฐ ์‘๊ณ ๊ท ์—ด ๋ฐœ์ƒ๊ฑฐ๋™

๊ทธ๋ฆผ 2๋Š” ์—๋„ˆ์ง€๋ฐ€๋„ 1341 J/mm2(์Šค์บ”์†๋„ 50 mm/s)์˜ ๋ ˆ์ด์ € ๋น” ์กฐ์‚ฌ์กฐ๊ฑด์„ ์ ์šฉํ•œ ์ง์„  ์šฉ์œต๋ถ€ ํ‘œ๋ฉด์˜ EBSD ๋ถ„์„๊ฒฐ๊ณผ๋ฅผ ๋‚˜ํƒ€๋‚ด๊ณ  ์žˆ์œผ๋ฉฐ, (a)๋Š” 247LC-CC, (b)๋Š” 247LC-DS ํ•ฉ๊ธˆ์— ๋Œ€ํ•œ ๊ฒฐ๊ณผ์ด๋‹ค. IQ(Image Quality) ๋ถ„์„๊ฒฐ๊ณผ์— ๋‚˜ํƒ€๋‚ธ ๋ฐ”์™€ ๊ฐ™์ด, ๋‘ ์†Œ์žฌ ์šฉ์œต๋ถ€์—๋Š” ์‘๊ณ ๊ท ์—ด ๋ฐœ์ƒ์ด ํ™•์ธ๋˜๋ฉฐ, ๋Œ€๋ถ€๋ถ„์˜ ์‘๊ณ ๊ท ์—ด์€ ์—ด์˜ํ–ฅ๋ถ€์˜ ์•กํ™”๊ท ์—ด๋กœ ์—ฐ๊ฒฐ๋˜๋Š” ์–‘์ƒ์„ ๋ณด์ธ๋‹ค. ๊ฐ ์†Œ์žฌ์˜ IPF(Inverse Pole Figure) ๊ฒฐ๊ณผ๋ฅผ ๋ณด๋ฉด, ์šฉ์œต๋ถ€์˜ ๋Œ€๋ถ€๋ถ„์€ ๋ฌด์ž‘์œ„์˜ ๊ฒฐ์ •๋ฐฉ์œ„๋ฅผ ๊ฐ€์ง€๋Š” ๋‹ค๊ฒฐ์ • ๋ฏธ์„ธ์กฐ์ง์„ ๋‚˜ํƒ€๋‚ด๋ฉฐ, ์‘๊ณ ๊ท ์—ด ๋ฐœ์ƒ ์œ„์น˜๋Š” ์šฉ์œต๋ถ€ ๊ฒฝ๊ณ„์„  ๋ถ€๊ทผ ์ผ๋ถ€ ์กด์žฌํ•˜๋Š” ์—ํ”ผํƒ์…œ ์„ฑ์žฅ๋œ ๊ฒฐ์ •๋ฆฝ๊ณ„๋กœ ํ™•์ธ๋œ๋‹ค. ํŠนํžˆ ํ•ด๋‹น ๊ฒฐ์ •๋ฆฝ๊ณ„๋Š” 20ยฐ ์ด์ƒ์˜ ๋ฐฉ์œ„์ฐจ๋ฅผ ๊ฐ–๋Š” ๊ฒƒ์œผ๋กœ ์ธก์ •๋œ ๋ฐ”, ๋‹ค๊ฒฐ์ • ์šฉ์œต๋ถ€์˜ ์ฃผ๋œ ์‘๊ณ ๊ท ์—ด ๋ฐœ์ƒ ์œ„์น˜๋Š” ์‘๊ณ ๊ฒฐ์ •๋ฆฝ๊ณ„(Solidification Grain Boundary)๋กœ ํŒ๋‹จ๋˜์—ˆ๋‹ค[17].

๊ทธ๋ฆผ 3์€ ๊ทธ๋ฆผ 2(b)์—์„œ ํ™•์ธ๋œ 247LC-DS ๋ ˆ์ด์ € ์šฉ์œต๋ถ€ ์‘๊ณ ๊ท ์—ด ํŠน์„ฑ์— ๋Œ€ํ•œ EPMA ๋ถ„์„๊ฒฐ๊ณผ๋ฅผ ๋‚˜ํƒ€๋‚ธ๋‹ค. ํ›„๋ฐฉ์‚ฐ๋ž€์ „์ž(Backscattered Electron, BSE) ์ด๋ฏธ์ง€๋ฅผ ํ†ตํ•ด ์‘๊ณ ๊ฒฐ์ •๋ฆฝ๊ณ„์—์„œ ๋ฐœ์ƒํ•œ ์‘๊ณ ๊ท ์—ด์€ ์šฉ์œต๋ถ€ ๊ฒฝ๊ณ„์„ ์„ ์ค‘์‹ฌ์œผ๋กœ ์•กํ™”๊ท ์—ด๊ณผ ์—ฐ๊ฒฐ๋œ ์–‘์ƒ์„ ๋ช…ํ™•ํžˆ ํ™•์ธํ•  ์ˆ˜ ์žˆ์œผ๋ฉฐ, ์šฉ์œต๋ถ€์—์„œ ์‘๊ณ ํŽธ์„๋œ ์šฉ์งˆ์›์†Œ(Hf, C, B)๊ฐ€ ์—ฐ์†์ ์œผ๋กœ ๋ถ„ํฌํ•จ์„ ํ™•์ธํ•  ์ˆ˜ ์žˆ๋‹ค. ํ•ด๋‹น ์šฉ์งˆ์›์†Œ๋Š” 247LC ํ•ฉ๊ธˆ์˜ ์‘๊ณ  ์‹œ ์‘๊ณ ํŽธ์„๋˜์–ด ๊ณ ์ƒ์•ก์ƒ ๊ณต์กด์˜จ๋„ ๋ฒ”์œ„๋ฅผ ํ™•๋Œ€์‹œํ‚ค๊ณ , ์ตœ์ข…์ ์œผ๋กœ ์‘๊ณ ๊ท ์—ด ๋ฐœ์ƒ์„ ์ด‰์ง„์‹œํ‚ค๋Š” ๊ฒƒ์œผ๋กœ ์•Œ๋ ค์ ธ ์žˆ๋‹ค[1]. ์ด๋Ÿฌํ•œ ์‘๊ณ ๊ฒฐ์ •๋ฆฝ๊ณ„ ์ƒ์˜ ์—ฐ์†์ ์ธ ํŽธ์„๊ฑฐ๋™์€ ํŒŒ์ดํ”„๋ผ์ธ ํ™•์‚ฐ(pipeline diffusion)์œผ๋กœ ์ž˜ ์•Œ๋ ค์ ธ ์žˆ์–ด[17], 247LC ํ•ฉ๊ธˆ ๋ ˆ์ด์ € ์šฉ์œต๋ถ€์˜ ์‘๊ณ ๊ท ์—ด์„ ์ €๊ฐ์‹œํ‚ค๊ธฐ ์œ„ํ•ด์„œ๋Š” ์‘๊ณ ๊ฒฐ์ •๋ฆฝ๊ณ„์˜ ํ˜•์„ฑ, ์œ ํ•ด ์›์†Œ ์‘๊ณ ํŽธ์„ ๋ฐ ํŒŒ์ดํ”„๋ผ์ธ ํ™•์‚ฐ ๊ฑฐ๋™ ์–ต์ œ๊ฐ€ ํ•„์š”ํ•จ์„ ์‹œ์‚ฌํ•œ๋‹ค.

3.2. ๊ธ‰์†์šฉ์œต์— ๋”ฐ๋ฅธ ์ผ๋ฐฉํ–ฅ์‘๊ณ  ๊ฒฐ์ •๋ฆฝ์˜ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ ๋ฐ ์‘๊ณ ๊ท ์—ด ์ €๊ฐ ์ƒ๊ด€๊ด€๊ณ„

์‘๊ณ ๊ฒฐ์ •๋ฆฝ๊ณ„ ์ƒ์˜ ํŒŒ์ดํ”„๋ผ์ธ ํ™•์‚ฐ ๋ฐ ๊ทธ์— ๋”ฐ๋ฅธ ์‘๊ณ  ๊ท ์—ด ๋ฐœ์ƒ ์–ต์ œ ๋ฐฉ์•ˆ์œผ๋กœ, ๋‹จ์ผ ๊ฒฐ์ •๋ฐฉ์œ„๋ฅผ ๊ฐ–๋Š” ์ผ๋ฐฉํ–ฅ์‘๊ณ  ๊ฒฐ์ •๋ฆฝ ๋‚ด์— ๋ ˆ์ด์ € ๋น”์„ ์กฐ์‚ฌํ•˜์—ฌ, ๋ ˆ์ด์ € ์šฉ์œต๋ถ€์˜ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ ๊ฑฐ๋™๊ณผ ์‘๊ณ ๊ท ์—ด ๋ฐœ์ƒ์˜ ์ƒ๊ด€๊ด€๊ณ„๋ฅผ ๊ฒ€ํ† ํ•˜์˜€๋‹ค. ๊ทธ๋ฆผ 4๋Š” 247LC-DS ํ•ฉ๊ธˆ ์‹ฑ๊ธ€ํŒจ์Šค(single-pass) ๋ ˆ์ด์ € ์šฉ์œต๋ถ€์˜ ๋Œ€ํ‘œ์ ์ธ (a)ํ‘œ๋ฉด, (b)๋‹จ๋ฉด ๋ฏธ์„ธ์กฐ์ง ๋ถ„์„๊ฒฐ๊ณผ๋ฅผ ๋‚˜ํƒ€๋‚ธ๋‹ค. 65 J/mm2 ์—๋„ˆ์ง€๋ฐ€๋„(์Šค์บ”์†๋„ 1000 mm/s, ์ž…์—ด๋Ÿ‰ 2 J/mm)์˜ ๋ ˆ์ด์ € ๋น” ์กฐ์‚ฌ ์กฐ๊ฑด ํ•˜์—์„œ, ์šฉ์œต๋ถ€๋Š” ๋‹จ์ผ ์ผ๋ฐฉํ–ฅ์‘๊ณ  ๊ฒฐ์ •๋ฆฝ ๋‚ด์— ํ˜•์„ฑ์‹œํ‚ฌ ์ˆ˜ ์žˆ์—ˆ๊ณ (์šฉ์œต๋ถ€ ํญ: ์•ฝ 0.32 mm, ์šฉ์œต๋ถ€ ๊นŠ์ด: ์•ฝ 0.3 mm), IPF ๋ถ„์„๊ฒฐ๊ณผ 99.9%์˜ ์šฉ์œต๋ถ€๋Š” ๋ชจ์žฌ์˜ ๊ฒฐ์ •๋ฐฉ์œ„์™€ ๋™์ผํ•œ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ๊ฑฐ๋™์„ ๋‚˜ํƒ€๋‚ด๋Š” ๊ฒƒ์œผ๋กœ ํ™•์ธ๋˜์—ˆ๋‹ค. ์ฆ‰, ๊ทธ๋ฆผ 2์˜ ๋ ˆ์ด์ € ์šฉ์œต ์กฐ๊ฑด ๋Œ€๋น„ ๊ธ‰์†์šฉ์œต ๋ฐ ์ดˆ์ €์ž…์—ด ์กฐ๊ฑด์„ ์ ์šฉํ•œ ๊ฒฐ๊ณผ, ์ „์ฒด ์šฉ์œต๋ถ€๋ฅผ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ์‹œํ‚ฌ ์ˆ˜ ์žˆ์—ˆ๋‹ค. ๊ฒฐ๊ณผ์ ์œผ๋กœ OM, IPF ๊ฒฐ๊ณผ์—์„œ ํ™•์ธํ•  ์ˆ˜ ์žˆ๋“ฏ์ด, ํ‘œ๋ฉด ๋ฐ ๋‹จ๋ฉด์—์„œ ์‘๊ณ ๊ท ์—ด ๋ฐœ์ƒ์€ ์™„์ „ํžˆ ์–ต์ œ๋˜์—ˆ์Œ์„ ์•Œ ์ˆ˜ ์žˆ๋‹ค.

๊ทธ๋ฆผ 5๋Š” 247LC-DS ํ•ฉ๊ธˆ์— ๋”๋ธ”ํŒจ์Šค(double-pass) ๋ ˆ์ด์ € ์šฉ์œต์„ ์ ์šฉํ•œ ํ‘œ๋ฉด ๋ฏธ์„ธ์กฐ์ง ๋ถ„์„ ๊ฒฐ๊ณผ๋ฅผ ๋‚˜ํƒ€๋‚ธ๋‹ค. ๋‹จ์ผ ๋ ˆ์ด์ € ๋น” ์กฐ์‚ฌ์กฐ๊ฑด์€ ๊ทธ๋ฆผ 4์™€ ๋™์ผํ•˜๋‹ค. IPF ๋ถ„์„ ๊ฒฐ๊ณผ๋กœ๋ถ€ํ„ฐ ๋”๋ธ”ํŒจ์Šค ์šฉ์œต๋ถ€์—์„œ๋„ 98.3%์˜ ๋†’์€ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ๋ฅ ์„ ํ™•์ธํ•  ์ˆ˜ ์žˆ์œผ๋ฉฐ, GB(Grain Boundary)๋ถ„ํฌ ์ด๋ฏธ์ง€๋กœ๋ถ€ํ„ฐ๋Š” ๊ฐ ํŒจ์Šค์˜ ์šฉ์œต๋ถ€ ๊ฒฝ๊ณ„์„ ์„ ์ œ์™ธํ•˜๋ฉด ์šฉ์œต๋ถ€ ๋‚ด์—์„œ๋Š” ๊ณ ๊ฐ ๊ฒฐ์ •๋ฆฝ๊ณ„ ํ˜•์„ฑ ๋˜ํ•œ ์ƒ๋‹นํžˆ ์–ต์ œ๋˜์—ˆ์Œ์„ ํ™•์ธํ•  ์ˆ˜ ์žˆ๋‹ค. ๊ฒฐ๊ณผ์ ์œผ๋กœ, IQ ๋ถ„์„ ์ด๋ฏธ์ง€์™€ ๊ฐ™์ด ๋ ˆ์ด์ € ์šฉ์œต๋ถ€ ์‘๊ณ ๊ท ์—ด ๋ฐœ์ƒ์€ ์™„์ „ํžˆ ์–ต์ œ๋œ, ๊ทธ๋ฆผ 4์™€ ๋™์ผํ•œ ๊ฒฐ๊ณผ๋ฅผ ์–ป์„ ์ˆ˜ ์žˆ์—ˆ๋‹ค. ๋”ฐ๋ผ์„œ ๋ณธ ๊ฒฐ๊ณผ๋Š”, ์ผ๋ฐฉํ–ฅ ์‘๊ณ  247LC ์ดˆ๋‚ด์—ดํ•ฉ๊ธˆ ๋ธ”๋ ˆ์ด๋“œ ์‹ค์ œ ํŒ์šฉ์ ‘ ์‹œ ์šฉ์ ‘๋ถ€ ์‘๊ณ ๊ท ์—ด ์–ต์ œ๋ฅผ ์œ„ํ•ด์„œ๋Š”, ์šฉ์ ‘๋ถ€ ์ „์ฒด์˜ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ ํ™•๋ณด์— ๋”ฐ๋ฅธ ๊ณ ๊ฐ ์‘๊ณ ๊ฒฐ์ •๋ฆฝ๊ณ„ ํ˜•์„ฑ ๋ฐ ํŒŒ์ดํ”„๋ผ์ธ ํ™•์‚ฐ ๊ฑฐ๋™์˜ ์–ต์ œ๊ฐ€ ํ•„์ˆ˜์ ์ž„์„ ์‹œ์‚ฌํ•˜๋ฉฐ, ์ผ๋ฐฉํ–ฅ์‘๊ณ  ๋ธ”๋ ˆ์ด๋“œ์˜ ๊ฒฐ์ •๋ฐฉ์œ„ ํŠน์„ฑ๊ณผ ์šฉ์ ‘๋ถ€ ์ „์ฒด๊ฐ€ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ๋  ์ˆ˜ ์žˆ๋Š” ์šฉ์ ‘ ๊ณต์ •์˜ ์ ์šฉ์ด ๊ณ ๋ ค๋˜์–ด์•ผ ํ•  ๊ฒƒ์œผ๋กœ ํŒ๋‹จ๋œ๋‹ค.

ํ•œํŽธ ๋ธ”๋ ˆ์ด๋“œ ์ œ์กฐ์šฉ์ ‘ ์‹œ์—๋Š” ์›ํ˜• ๋˜๋Š” ํƒ€์›ํ˜• ์šฉ์ ‘ ๊ฒฝ๋กœ์— ๋Œ€ํ•œ ๊ณ ๋ ค๊ฐ€ ํ•„์š”ํ•˜๋ฉฐ, ๋”ฐ๋ผ์„œ ๊ทธ๋ฆผ 4, 5์—์„œ ์–ป์–ด์ง„ ์‘๊ณ ๊ท ์—ด ์–ต์ œ ๋ฐฉ์•ˆ์˜ ํ•ด๋‹น ์šฉ์ ‘๊ฒฝ๋กœ ์ ์šฉ ๊ฐ€๋Šฅ์„ฑ์— ๋Œ€ํ•ด ๊ฒ€ํ† ํ•  ํ•„์š”๊ฐ€ ์žˆ๋‹ค. ๊ทธ๋ฆผ 6์€ ๊ทธ๋ฆผ 5์˜ ์กฐ๊ฑด์„ ์ ์šฉํ•œ 247LC-DS ํ•ฉ๊ธˆ์˜ ํŠธ๋ฆฌํ”ŒํŒจ์Šค(triple-pass) ๋ ˆ์ด์ € ์šฉ์œต๋ถ€ ํ‘œ๋ฉด ๋ถ„์„๊ฒฐ๊ณผ๋ฅผ ๋‚˜ํƒ€๋‚ด๋ฉฐ, (a)๋Š” ์›ํ˜•, (b)๋Š” ํƒ€์›ํ˜• ๊ฒฝ๋กœ๋ฅผ ๋ถ€์—ฌํ•œ ๊ฒฐ๊ณผ์ด๋‹ค. ์„ธ๋ถ€์ ์ธ ์šฉ์œต๋ถ€ ์น˜์ˆ˜(๊ณก๋ฅ )๋Š” ๊ทธ๋ฆผ 6์— ํ•จ๊ป˜ ๊ธฐ์žฌํ•˜์˜€๋‹ค. ์ง์„  ๊ฒฝ๋กœ์˜ ๋ ˆ์ด์ € ์šฉ์œต๊ณผ ๋‹ฌ๋ฆฌ ๊ณก๋ฅ ์ด ๋ถ€๊ฐ€๋จ์— ๋”ฐ๋ผ ์šฉ์œต๋ถ€์—๋Š” ๋ฌด์ž‘์œ„ํ•œ ๊ฒฐ์ •๋ฐฉ์œ„์˜ ๋‹ค๊ฒฐ์ •๋ฆฝ ๋ฐ ์ƒ๋‹น๋Ÿ‰์˜ ์ €๊ฐ ๋ฐ ๊ณ ๊ฐ๊ฒฐ์ •๋ฆฝ๊ณ„ ํ˜•์„ฑ์„ ํ™•์ธํ•  ์ˆ˜ ์žˆ์œผ๋ฉฐ, ์—ํ”ผํƒ์…œ ์„ฑ์žฅ๋ฅ ์€ 69.0%(๊ทธ๋ฆผ 6(a) ์›ํ˜• ๊ฒฝ๋กœ) ๋ฐ 85.0%(๊ทธ๋ฆผ6(b) ํƒ€์›ํ˜• ๊ฒฝ๋กœ)๋กœ ์ธก์ •๋˜์—ˆ๋‹ค. ๊ทธ ๊ฒฐ๊ณผ ์ƒ๋‹น๋Ÿ‰์˜ ์‘๊ณ ๊ท ์—ด ๋ฐœ์ƒ์ด ํ™•์ธ๋˜์—ˆ์œผ๋ฉฐ, ํŠนํžˆ ํƒ€์›ํ˜• ๊ฒฝ๋กœ์—์„œ๋Š”(๊ทธ๋ฆผ 6(b)) ๊ฐ€์žฅ ๊ณก๋ฅ ์ด ํฐ (7.12R)์œ„์น˜์—์„œ, 5ยฐ์˜ ๋น„๊ต์  ๋‚ฎ์€ ๋ฐฉ์œ„์ฐจ๋ฅผ ๊ฐ€์ง€๋Š” ๊ฒฐ์ •๋ฆฝ๊ณ„์—์„œ๋„ ํŒŒ์ดํ”„๋ผ์ธ ํ™•์‚ฐ์— ๊ธฐ์ธํ•œ ์‘๊ณ ๊ท ์—ด ๋ฐœ์ƒ์„ ๊ด€์ฐฐํ•  ์ˆ˜ ์žˆ์—ˆ๋‹ค.

์ด๋Ÿฌํ•œ ํ˜„์ƒ์„ ๊ณ ์ฐฐํ•˜๊ธฐ ์œ„ํ•ด, ์›ํ˜•์›Œ๋ธ” ์Šค์บ”์„ ์ด์šฉํ•œ ๋ ˆ์ด์ € ์šฉ์œต์„ ์‹ค์‹œํ•˜์˜€์œผ๋ฉฐ, ๊ทธ๋ฆผ 7์€ ๋Œ€ํ‘œ์ ์ธ ๊ฒฐ๊ณผ๋ฅผ ๋‚˜ํƒ€๋‚ธ๋‹ค. ์›Œ๋ธ”๊ณผ ๊ฐ™์€ ์—ด์›์˜ ์˜ค์‹ค๋ ˆ์ด์…˜(oscillation)์€ ์‘๊ณ ์‹œ์˜ ๊ตญ๋ถ€์ ์ธ ์‘๊ณ ์†๋„์™€ ์˜จ๋„๊ตฌ๋ฐฐ ๋ณ€ํ™”๋ฅผ ์•ผ๊ธฐํ•˜๋ฉฐ, ๊ทธ ๊ฒฐ๊ณผ ๋ฌด์ž‘์œ„ํ•œ ๊ฒฐ์ •๋ฆฝ ํ˜•ํƒœ ๋ฐ ๊ฒฐ์ •๋ฐฉ์œ„๋ฅผ ๊ฐ–๊ฒŒ ํ•˜๋Š” ๊ฒƒ์œผ๋กœ ์ž˜ ์•Œ๋ ค์ ธ ์žˆ๋‹ค[10]. ์ด๋Ÿฌํ•œ ํ˜„์ƒ์€ ๊ทธ๋ฆผ 7์—์„œ๋„ ํ™•์ธ ๊ฐ€๋Šฅํ•˜๋‹ค. ๋ฌด์ž‘์œ„ํ•œ ๋‹ค๊ฒฐ์ • ๋ฏธ์„ธ์กฐ์ง(IPF ์ด๋ฏธ์ง€) ๋ฐ ๋‚ฎ์€ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ๋ฅ (52.3%)์˜ ๋‚ฎ์€ ๊ฐ’์„ ๋ณด์ด๋ฉฐ, ๊ฒฐ๊ณผ์ ์œผ๋กœ ์šฉ์œต๋ถ€ ๋‚ด์— ํ˜•์„ฑ๋œ ๊ณ ๊ฐ๊ฒฐ์ •๋ฆฝ๊ณ„๋ฅผ ์ค‘์‹ฌ์œผ๋กœ(GB ์ด๋ฏธ์ง€) ์‘๊ณ ๊ท ์—ด ๋ฐœ์ƒ(IQ ์ด๋ฏธ์ง€)๊ณผ ์ด์–ด์ง€๋Š” ์–‘์ƒ์„ ๋ณด์ธ๋‹ค. ์ฆ‰, ์›ํ˜•๊ฒฝ๋กœ ์ ์šฉ ๋˜ํ•œ ์ผ์‹œ์ ์ธ ์›Œ๋ธ” ์Šค์บ”์˜ ์กฐ๊ฑด์— ํ•ด๋‹น๋  ์ˆ˜ ์žˆ์œผ๋ฏ€๋กœ, ์‹ค์ œ ๋ธ”๋ ˆ์ด๋“œ ์šฉ์ ‘ ์‹œ์—๋Š” ์ง์„  ๊ฒฝ๋กœ๋ฅผ ๊ธฐ๋ฐ˜์œผ๋กœ ํ•œ ๊ณต์ •์„ค๊ณ„ ๋˜๋Š” ๊ณก๋ฅ  ๊ฒฝ๋กœ ์ƒ์˜ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ ๋ฐฉ์•ˆ์— ๋Œ€ํ•œ ์‚ฌ์ „ ๊ณ ๋ ค๊ฐ€ ํ•„์š”ํ•จ์„ ์‹œ์‚ฌํ•œ๋‹ค.

3.3. ๋ฌด๊ท ์—ด ๋ ˆ์ด์ € ์šฉ์œต๋ถ€์˜ ๋ฏธ์„ธ์กฐ์ง๊ณผ ๊ฒฝ๋„

3.2์ ˆ์—์„œ ์ œ์‹œํ•œ ์‘๊ณ ๊ท ์—ด์ด ์™„์ „ ์–ต์ œ๋œ 247LC-DS ์ดˆ๋‚ด์—ดํ•ฉ๊ธˆ ์šฉ์œต๋ถ€ ํ™•๋ณด ๊ฒฐ๊ณผ๋Š”, ๋™์ผ ์†Œ์žฌ์— ๋Œ€ํ•œ ์œ ์‚ฌํ•œ ์ตœ๊ทผ ์„ ํ–‰ ์—ฐ๊ตฌ ์ƒ์—๋„ ๋ณด๊ณ ๋˜์ง€ ์•Š์•˜๋˜ ์ƒˆ๋กœ์šด ๊ฒฐ๊ณผ๋ฌผ๋กœ[18,19], ํ•ด๋‹น ๋ฏธ์„ธ์กฐ์ง์— ๋Œ€ํ•œ ๋Œ€ํ‘œ์ ์ธ ๊ฒฐ๊ณผ๋ฅผ ํ•จ๊ป˜ ์ œ์‹œ ํ•  ํ•„์š”๊ฐ€ ์žˆ๋‹ค. ๊ทธ๋ฆผ 8์€ ๊ทธ๋ฆผ 5์˜ ๋”๋ธ”ํŒจ์Šค ๋ ˆ์ด์ € ํ‘œ๋ฉด ์šฉ์œต๋ถ€ (a)EPMA ๋ฐ (b)TEM ๋ถ„์„ ๊ฒฐ๊ณผ๋ฅผ ๋‚˜ํƒ€๋‚ธ๋‹ค. ๊ทธ๋ฆผ 8(a) BSE ์ด๋ฏธ์ง€๋กœ๋ถ€ํ„ฐ ์…€(cell) ๊ฐ„๊ฒฉ ์•ฝ 1 ฮผm ์ˆ˜์ค€์˜ ๋ฏธ์„ธํ•œ ์…€ ์‘๊ณ ์กฐ์ง์„ ๊ด€์ฐฐํ•  ์ˆ˜ ์žˆ์œผ๋ฉฐ, ์…€ ๊ฒฝ๊ณ„์—๋Š” ํ•ฉ๊ธˆ์›์†Œ Ta, Hf ๋ฐ C์˜ ์‘๊ณ ํŽธ์„ ๋ฐ ๋ฐฑ์ƒ‰ ์ƒ์˜ ํ˜•์„ฑ์ด ๊ด€์ฐฐ๋˜์—ˆ๋‹ค.

๊ทธ๋ฆผ 8(b)์— ๋‚˜ํƒ€๋‚ธ TEM ๋ถ„์„๊ฒฐ๊ณผ, ํ•ด๋‹น ๋ฐฑ์ƒ‰์ƒ์€ Ta, Hf ๋ฐ C๋กœ ๊ตฌ์„ฑ๋œ MC ํƒ„ํ™”๋ฌผ๋กœ ํŒ๋‹จ๋˜์—ˆ๊ณ , ๋ ˆ์ด์ € ์šฉ์œต๋ถ€ ์ƒ์˜ ๋ถ„์œจ์€ ์•ฝ 0.3%๋กœ ์ธก์ •๋˜์—ˆ๋‹ค. ์ด๋Š” 247LC ํ•ฉ๊ธˆ์˜ ์ฃผ์กฐ์žฌ ๋ฐ ์•„ํฌ์šฉ์ ‘๋ถ€์—์„œ ์ธก์ •๋œ MC ํƒ„ํ™”๋ฌผ ๋ถ„์œจ ๋Œ€๋น„ ์ƒ๋‹น๋Ÿ‰ ์ €๊ฐ๋œ ๊ฐ’์ž„์„ ์•Œ ์ˆ˜ ์žˆ๋‹ค[13,16]. ์…€ ๊ฒฝ๊ณ„์— ์กด์žฌํ•˜๋Š” 247LC ํ•ฉ๊ธˆ์˜ MCํƒ„ํ™”๋ฌผ์€ ์‘๊ณ  ์ตœ์ข…๋‹จ๊ณ„์—์„œ ์‘๊ณ ํŽธ์„๊ณผ ์—ฐ๊ณ„๋˜์–ด ํ˜•์„ฑ๋˜๋Š” ๊ฒƒ์œผ๋กœ ์•Œ๋ ค์ ธ ์žˆ๋‹ค[11,13,16]. Thermo-calc ์†Œํ”„ํŠธ์›จ์–ด(2021a, TCNi9)๋กœ๋ถ€ํ„ฐ ๋„์ถœํ•œ Ni-Ta, Ni-Hf, Ni-C 2์›๊ณ„ ์ƒ์˜ ํ‰ํ˜•๋ถ„๋ฐฐ๊ณ„์ˆ˜(keq)๋Š” ๊ฐ๊ฐ 0.88, 0.05, 0.22์ด๋ฉฐ, Aziz๊ฐ€ ์ œ์•ˆํ•œ ์‘๊ณ ์†๋„ ์˜์กดํ˜• ๋ถ„๋ฐฐ๊ณ„์ˆ˜(kv) ๊ณ„์‚ฐ๊ณผ์ •์„ ๊ณ ๋ คํ•  ๋•Œ[20], ๋ณธ ์—ฐ๊ตฌ์—์„œ ํ™•์ธ๋œ ๊ธ‰์† ๋ ˆ์ด์ € ์šฉ์œต๋ถ€์˜ ๋‚ฎ์€ MC ํƒ„ํ™”๋ฌผ ๋ถ„์œจ์€ ๊ธ‰์†์‘๊ณ  ์‹œ์˜ Ta, Hf, C์˜ ๋ถ„๋ฐฐ๊ณ„์ˆ˜ ์ฆ๊ฐ€ ํšจ๊ณผ์— ๋”ฐ๋ฅธ ์‘๊ณ ํŽธ์„ ์ €๊ฐ์— ์˜ํ•œ ๊ฒฐ๊ณผ๋กœ ์‚ฌ๋ฃŒ๋œ๋‹ค. ๋”๋ถˆ์–ด ๊ทธ๋ฆผ 3์— ๋‚˜ํƒ€๋‚ธ ๋ฐ”์™€ ๊ฐ™์ด, ์‘๊ณ ๊ท ์—ด ๋ฐœ์ƒ์—๋Š” ์šฉ์œต๋ถ€์—์„œ ์‘๊ณ ํŽธ์„๋œ ์šฉ์งˆ์›์†Œ(Hf, C ๋“ฑ)์˜ ํŒŒ์ดํ”„๋ผ์ธ ํ™•์‚ฐ์ด ํฐ ์˜ํ–ฅ์„ ๋ฏธ์น˜๋Š” ๋ฐ”, ๊ทธ๋ฆผ 5์—์„œ ํ™•์ธ๋œ ๊ธ‰์†์šฉ์œต๋ถ€ ์‘๊ณ ๊ท ์—ด ์–ต์ œ ํ˜„์ƒ์€ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ์— ๋”ฐ๋ฅธ ์‘๊ณ ๊ฒฐ์ •๋ฆฝ๊ณ„ ํ˜•์„ฑ์–ต์ œ ๋ฟ๋งŒ ์•„๋‹ˆ๋ผ, ๊ธ‰์†์šฉ์œต ์ ์šฉ์— ๋”ฐ๋ฅธ ํ•ด๋‹น ์šฉ์งˆ์›์†Œ์˜ ์‘๊ณ ํŽธ์„ ์ €๊ฐ๊ณผ ๊ทธ์— ๋”ฐ๋ฅธ ์‘๊ณ ๊ท ์—ด ๋ฏผ๊ฐ๋„ ๊ฐ์†Œ์˜ ์˜ํ–ฅ๋„ ์ผ๋ถ€ ์กด์žฌํ•  ๊ฒƒ์œผ๋กœ ์ถ”์ •๋œ๋‹ค.

๊ทธ๋ฆผ 9๋Š” ๊ทธ๋ฆผ 5์— ๋‚˜ํƒ€๋‚ธ 247LC-DS ํ•ฉ๊ธˆ์˜ ๋ฌด๊ท ์—ด ๋ ˆ์ด์ € ์šฉ์œต๋ถ€์˜ ๊ฒฝ๋„ํ‰๊ฐ€ ๊ฒฐ๊ณผ๋ฅผ ๋‚˜ํƒ€๋‚ธ๋‹ค. ๊ฒฝ๋„์ธก์ • ์œ„์น˜๋Š” ์šฉ์œต๋ถ€ ํ‘œ๋ฉด OM ์ด๋ฏธ์ง€์— ๋‚˜ํƒ€๋‚ด์—ˆ๋‹ค. ๋ ˆ์ด์ € ์šฉ์œต๋ถ€ ์ „์ฒด๋Š” ์•ฝ 330 HV์˜ ๊ฒฝ๋„๋ฅผ ๋‚˜ํƒ€๋‚ด๋ฉฐ, ์ด๋Š” 247LC ๋ชจ์žฌ์™€ ๋™๋“ฑ์ˆ˜์ค€์— ํ•ด๋‹นํ•˜๋Š” ๊ฐ’์ž„์„ ํ™•์ธํ•  ์ˆ˜ ์žˆ๋‹ค. ๋”๋ถˆ์–ด ์ดˆ์ €์ž…์—ด ๋ ˆ์ด์ € ์กฐ์‚ฌ ์กฐ๊ฑด ์ ์šฉ์„ ํ†ตํ•ด, ๊ตญ๋ถ€์ ์ธ ๊ฒฝ๋„ ์ €ํ•˜ ๋“ฑ์˜ ์—ด์˜ํ–ฅ๋ถ€ ํ˜•์„ฑ ๋˜ํ•œ ์–ต์ œ๋˜์—ˆ์Œ์„ ์ถ”๊ฐ€์ ์œผ๋กœ ํ™•์ธํ•  ์ˆ˜ ์žˆ๋‹ค. ๋”ฐ๋ผ์„œ ๋ณธ ์—ฐ๊ตฌ์—์„œ ํ™•๋ณดํ•œ ๋ ˆ์ด์ € ํ‘œ๋ฉด์šฉ์œต ์กฐ๊ฑด์€ ๊ธ‰์†์‘๊ณ  ํšจ๊ณผ์— ๋”ฐ๋ฅธ ์‘๊ณ ํŽธ์„ ๋ฐ ๊ณ ์˜จ๊ท ์—ด์˜ ์–ต์ œ๋ฟ๋งŒ ์•„๋‹ˆ๋ผ ๊ธฐ๊ณ„์  ์„ฑ์งˆ ๊ด€์ ์—์„œ๋„ ์œ ์˜๋ฏธํ•œ ๊ณต์ •์กฐ๊ฑด์œผ๋กœ ์‚ฌ๋ฃŒ๋œ๋‹ค.

4. ๊ฒฐ ๋ก 

๋ณธ ๋…ผ๋ฌธ์—์„œ๋Š” ๋‚œ์šฉ์ ‘์„ฑ 247LC ์ผ๋ฐฉํ–ฅ์‘๊ณ  ์ดˆ๋‚ด์—ดํ•ฉ๊ธˆ์ด ์ ์šฉ๋œ ๊ฐ€์Šคํ„ฐ๋นˆ ๋ธ”๋ ˆ์ด๋“œ์˜ ๊ฑด์ „ํ•œ ํŒ์šฉ์ ‘๋ถ€ ํ™•๋ณด๋ฅผ ์œ„ํ•ด, ์‹ฑ๊ธ€๋ชจ๋“œ ํŒŒ์ด๋ฒ„ ๋ ˆ์ด์ € ๊ธ‰์†์šฉ์œต๋ถ€์˜ ์•ผ๊ธˆํ•™์  ์‘๊ณ ๊ท ์—ด ์–ต์ œ๋ฐฉ์•ˆ์— ๋Œ€ํ•ด ๊ธฐ์ดˆ์ ์œผ๋กœ ๊ฒ€ํ† ํ•˜์˜€๋‹ค. ์•„๋ž˜์™€ ๊ฐ™์ด ๋ณธ ๋…ผ๋ฌธ์˜ ๊ฒฐ๋ก ์„ ์š”์•ฝํ•œ๋‹ค.

247LC ์ดˆ๋‚ด์—ดํ•ฉ๊ธˆ ๋ ˆ์ด์ € ํ‘œ๋ฉด์šฉ์œต๋ถ€(์Šค์บ”์†๋„: 50 mm/s, ์ž…์—ด๋Ÿ‰: 40 J/mm, ์—๋„ˆ์ง€ ๋ฐ€๋„: 1341 J/mm2)์—์„œ ๋ฌธ์ œ ์‹œ ๋˜๋Š” ์‘๊ณ ๊ท ์—ด์€ ๊ณ ๊ฐ์˜ ๋ฐฉ์œ„์ฐจ๋ฅผ ๊ฐ–๋Š” ์‘๊ณ ๊ฒฐ์ •๋ฆฝ๊ณ„์ƒ์˜ ์šฉ์งˆ์›์†Œ(Hf, Ta, C ๋“ฑ) ์‘๊ณ ํŽธ์„ ๋ฐ ํŒŒ์ดํ”„๋ผ์ธ ํ™•์‚ฐ์— ๊ธฐ์ธํ•˜๋Š” ๊ฒƒ์œผ๋กœ ํ™•์ธ๋˜์—ˆ๋‹ค.

๋‹จ์ผ ์ผ๋ฐฉํ–ฅ์‘๊ณ  ๊ฒฐ์ •๋ฆฝ ๋‚ด์˜ ๋ ˆ์ด์ € ๊ธ‰์†์šฉ์œต(์Šค์บ”์†๋„ : 1000 mm/s, ์ž…์—ด๋Ÿ‰: 2 J/mm, ์—๋„ˆ์ง€๋ฐ€๋„: 65 J/mm2)์„ ํ†ตํ•ด ์ „์ฒด ์šฉ์œต๋ถ€์˜ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ ๊ฑฐ๋™์„ ํ™•๋ณดํ•  ์ˆ˜ ์žˆ์—ˆ๊ณ , ์—ํ”ผํƒ์…œ ์„ฑ์žฅ์— ๋”ฐ๋ฅธ ๊ณ ๊ฐ ์‘๊ณ ๊ฒฐ์ •๋ฆฝ๊ณ„ ํ˜•์„ฑ ์–ต์ œ, ๊ธ‰์†์‘๊ณ  ํšจ๊ณผ์— ๋”ฐ๋ฅธ ์‘๊ณ ํŽธ์„ (Hf, C ๋“ฑ) ๋ฐ ํŒŒ์ดํ”„ ๋ผ์ธ ํ™•์‚ฐ ์ €๊ฐ์„ ํ†ตํ•ด, ์™„์ „ํžˆ ์‘๊ณ ๊ท ์—ด์ด ์–ต์ œ๋œ ๋ฌด๊ท ์—ด ๋ ˆ์ด์ € ์šฉ์œต๋ถ€๋ฅผ ์–ป์„ ์ˆ˜ ์žˆ์—ˆ๋‹ค.

๊ณก๋ฅ ์ด ๋ถ€๊ฐ€๋œ ๋ ˆ์ด์ € ์šฉ์œต๊ฒฝ๋กœ๋ฅผ ์ ์šฉํ•  ์‹œ, ๋ฌด์ž‘์œ„ํ•œ ๋‹ค๊ฒฐ์ •๋ฐฉ์œ„๋ฅผ ๋‚˜ํƒ€๋‚ด๋ฉฐ, ์ตœ์ € 69.0%๊นŒ์ง€ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ๋ฅ ์ด ๋‚ฎ์•„์ง์„ ํ™•์ธํ•  ์ˆ˜ ์žˆ์—ˆ๋‹ค. ๊ฒฐ๊ณผ์ ์œผ๋กœ ์‘๊ณ ๊ท ์—ด ๋ฐœ์ƒ์€ ์žฌ์ฐจ ์‹ฌํ™”๋˜๋Š” ์–‘์ƒ์„ ๋ณด์˜€๋‹ค. ๋”ฐ๋ผ์„œ, ๊ธ‰์†์šฉ์œต ๋ฐ ๊ธ‰์†์‘๊ณ  ์ ์šฉ์„ ํ†ตํ•œ ์‘๊ณ ํŽธ์„ ์ €๊ฐํšจ๊ณผ๊ฐ€ ์ˆ˜๋ฐ˜๋˜๋”๋ผ๋„, ์‹ค์ œ ๋ธ”๋ ˆ์ด๋“œ ํŒ์šฉ์ ‘ ์‹œ์—๋Š” ์šฐ์ˆ˜ํ•œ ์—ํ”ผํƒ์…œ ์„ฑ์žฅ๋ฅ  ํ™•๋ณด์— ์œ ๋ฆฌํ•œ ์ •๋ฐ€ํ•œ ์šฉ์ ‘๊ฒฝ๋กœ ์„ค๊ณ„๊ฐ€ ํ•„์š”ํ•  ๊ฒƒ์œผ๋กœ ์‚ฌ๋ฃŒ๋˜์—ˆ๋‹ค.

Acknowledgements

๋ณธ ๋…ผ๋ฌธ์€ ์‚ฐ์—…ํ†ต์ƒ์ž์›๋ถ€์˜ ์žฌ์›์œผ๋กœ ํ•œ๊ตญ์‚ฐ์—…๊ธฐ์ˆ ํ‰๊ฐ€๊ด€๋ฆฌ์›(์ „๋žตํ•ต์‹ฌ์†Œ์žฌ์ž๋ฆฝํ™”๊ธฐ์ˆ ๊ฐœ๋ฐœ์‚ฌ์—…(No.20011103), ๊ธฐ๊ณ„์‚ฐ์—…ํ•ต์‹ฌ๊ธฐ์ˆ ๊ฐœ๋ฐœ์‚ฌ์—…(No.20015063))์˜ ์ง€์›์„ ๋ฐ›์•„ ์ˆ˜ํ–‰๋œ ์—ฐ๊ตฌ ๊ฒฐ๊ณผ๋ฌผ์ž„.

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Figures and Tables

Fig. 1.

Schematic description of single-mode fiber laser facility and surface melting experiment.

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Fig. 2.

EBSD images of single-pass laser melting surface for (a)247LC-CC and (b)247LC-DS specimens. โ€ปIQ: image quality, IPF: inverse pole figure, DS: directional solidification

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Fig. 3.

Element distribution of laser melted surface for 247LC-DS specimen analyzed by EPMA. โ€ปBSE: backscatter electron

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Fig. 4.

OM, EBSD images of single-pass laser melting (a) surface and (b) cross-section for 247LC-DS specimen.

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Fig. 5.

EBSD images of double-pass laser melting surface under linear scan for 247LC-DS specimen. โ€ปGB: grain boundary

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Fig. 6.

EBSD images of triple-pass laser melting surface under (a) circular and (b) ellipse motion for 247LC-DS specimen.

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Fig. 7.

EBSD images of single-pass laser melting surface under circular wobble scan for 247LC-DS specimen.

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Fig. 8.

Representative microstructure of hot crack-free laser melting zone of 247LC-DS specimen; (a) element distribution of the melting zone and (b) phase characterization by EPMA and TEM. โ€ปDF: dark field

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Fig. 9.

Hardness distribution of hot crack-free laser melting zone of 247LC-DS specimen

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Table 1.

Chemical composition of material used (mass%).

Material Ni C Cr Co Mo W Ta Ti Al B Zr Hf P S
247LC Bal. 0.07 8.1 9.2 0.5 9.5 3.2 0.7 5.6 0.015 0.015 1.4 <0.0006 <0.0002
Table 2.

Conditions of laser surface melting by single-mode fiber laser.

Linear scan (without wobble)
Laser power (kW) 2
Scan speed (mm/s) 50 1000
Heat input (J/mm) 40 2
Defocusing distance (mm) 0 0 +5 +10
Energy density (J/mm2) 1341 67 66 65
Circular wobble scan
Laser power (kW) 2
Scan speed (mm/s) 1000
Defocusing distance (mm) +10
Wobble amplitude (mm) 0.1
Wobble frequency (Hz) 15000
Wobble speed (mm/s) 9420
Energy density (J/mm2) 6.90